发明授权
- 专利标题: Tertiary alcohol compounds having an alicyclic structure
- 专利标题(中): 具有脂环结构的叔醇化合物
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申请号: US10025064申请日: 2001-12-19
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公开(公告)号: US06469220B2公开(公告)日: 2002-10-22
- 发明人: Koji Hasegawa , Takeshi Kinsho , Takeru Watanabe
- 申请人: Koji Hasegawa , Takeshi Kinsho , Takeru Watanabe
- 优先权: JP2000-391867 20001225
- 主分类号: C07C3522
- IPC分类号: C07C3522
摘要:
The present invention provides novel tertiary alcohol compounds which are useful as monomers for the preparation of photoresist materials having high transparency and a great affinity for the substrate and hence suitable for use in photolithography using a light source comprising preferably light having a wavelength of 300 nm or less and more preferably light emitted from an ArF excimer laser. Specifically, the present invention provides tertiary alcohols compounds represented by the following general formula (1): wherein R1 and R2 each independently represent a straigh-chain, branched or cyclic alkyl group having 1 to 10 carbon atoms, in which some or all of the hydrogen atoms on the constituent carbon atoms may be replaced by a halogen atom or halogen atoms, or R1 and R2 may be joined together to form an aliphatic hydrocarbon ring; Z represents a straight-chain, branched or cyclic divalent organic group having 2 to 10 carbon atoms; and k is 0 or 1.
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