发明授权
US06482565B1 Photoresist cross-linker and photoresist composition comprising the same
失效
光阻抗交联剂和包含其的光致抗蚀剂组合物
- 专利标题: Photoresist cross-linker and photoresist composition comprising the same
- 专利标题(中): 光阻抗交联剂和包含其的光致抗蚀剂组合物
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申请号: US09448964申请日: 1999-11-24
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公开(公告)号: US06482565B1公开(公告)日: 2002-11-19
- 发明人: Jae Chang Jung , Keun Kyu Kong , Myoung Soo Kim , Hyoung Gi Kim , Hyeong Soo Kim , Ki Ho Baik
- 申请人: Jae Chang Jung , Keun Kyu Kong , Myoung Soo Kim , Hyoung Gi Kim , Hyeong Soo Kim , Ki Ho Baik
- 优先权: KR98-51356 19981127; KR99-5825 19990222
- 主分类号: G03F7004
- IPC分类号: G03F7004
摘要:
The present invention relates to a cross-linker for use in a photoresist which is suitable for a photolithography process using KrF (248 ru), ArF (193 nm), E-beam, ion beam or EUV light source. According to the present invention, preferred cross-linkers comprise a copolymer having repeating units derived from: (i) a compound represented by following Chemical Formula 1 and/or (ii) one or more compound(s) selected from the group consisting of acrylic acid, methacrylic acid and maleic anhydride. wherein, R1, R2 and R individually represent straight or branched C1-10 alkyl, straight or branched C1-10 ester, straight or branched C1-10 ketone, straight or branched C1-10 carboxylic acid, straight or branched C1-10 acetal, straight or branched C1-10 alkyl including at least one hydroxyl group, straight or branched C1-10 ester including at least one hydroxyl group, straight or branched C1-10 ketone including at least one hydroxyl group, straight or branched C1-10 carboxylic acid including at least one hydroxyl group, and straight or branched C1-10 acetal including at least one hydroxyl group; R3 represents hydrogen or methyl; m represents 0 or 1; and n represents a number of 1 to 5.
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