发明授权
- 专利标题: Radiation-sensitive resin composition
- 专利标题(中): 辐射敏感树脂组合物
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申请号: US09662160申请日: 2000-09-14
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公开(公告)号: US06482568B1公开(公告)日: 2002-11-19
- 发明人: Katsuji Douki , Kiyoshi Murata , Hiroyuki Ishii , Toru Kajita , Tsutomu Shimokawa
- 申请人: Katsuji Douki , Kiyoshi Murata , Hiroyuki Ishii , Toru Kajita , Tsutomu Shimokawa
- 优先权: JP11-264110 19990917; JP11-291291 19991013; JP11-325222 19991116
- 主分类号: G03F7004
- IPC分类号: G03F7004
摘要:
A radiation-sensitive resin composition comprising (A) a resin containing an acid-dissociable group which is insoluble or scarcely soluble in alkali and becomes alkali soluble when the acid-dissociable group dissociates, comprising the following recurring unit (I), recurring unit (II), and at least one of the recurring units (III-1) and (III-2), and (B) a photoacid generator. The radiation-sensitive resin composition is suitable for use as a chemically-amplified resist showing sensitivity to active radiation such as deep ultraviolet rays represented by a KrF excimer laser or ArF excimer laser, exhibiting superior dry etching resistance without being affected by types of etching gas, having high radiation transmittance, exhibiting excellent basic characteristics as a resist such as sensitivity, resolution, and pattern shape, possessing excellent storage stability as a composition, and exhibiting sufficient adhesion to substrates.
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