发明授权
- 专利标题： Tester for semiconductor device
- 专利标题（中）： 半导体器件测试仪
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申请号： US09823958申请日： 2001-03-28
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公开(公告)号： US06483331B2公开(公告)日： 2002-11-19
- 发明人: Hiroyuki Tamaru , Mitsuo Fujii
- 申请人： Hiroyuki Tamaru , Mitsuo Fujii
- 优先权： JP2000-088705 20000328; JP2001-086273 20010323
- 主分类号： G01R3102
- IPC分类号： G01R3102
摘要：
A connection portion having a plurality of pads is provided on a test board. On the connection portion, a plurality of anisotropic conductive sheets, the sheet for the power source and the sheet for grounding are provided in an alternate manner. The connection portion and the semiconductor device are connected via the anisotropic conductive sheet, the sheet for the power source and the sheet for grounding. When the pin arrangement of the semiconductor device is changed, the sheet for the power source and the sheet for the grounding are changed.
公开/授权文献
- US20010026168A1 Tester for semiconductor device 公开/授权日：2001-10-04
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