发明授权
US06490993B2 Rotating device for plasma immersion supported treatment of substrates 失效
用于等离子体浸渍的旋转装置支持基底处理

Rotating device for plasma immersion supported treatment of substrates
摘要:
A rotary drive which is suitable in treatment of three-dimensional workpieces. In this rotary apparatus, only the removably mounted rotatable rods that serve as sample holders are connected to high voltage, which is delivered via a central high-voltage lead-in at the lower end of the rods, while the actual drive elements for rotating the rods are electrically insulated therefrom by suitable ceramic insulating elements.
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