公开(公告)号：US06490993B2

公开(公告)日：2002-12-10

申请号：US09341763

申请日：1999-09-09

申请人： Ronald Neidhardt ,  Jeanne Forget ,  Karl Kohlhof ,  Siegmar Schoser

发明人： Ronald Neidhardt ,  Jeanne Forget ,  Karl Kohlhof ,  Siegmar Schoser

IPC分类号： C23C16509

CPC分类号： C23C14/48 ,  C23C14/505 ,  C23C16/4584

摘要： A rotary drive which is suitable in treatment of three-dimensional workpieces. In this rotary apparatus, only the removably mounted rotatable rods that serve as sample holders are connected to high voltage, which is delivered via a central high-voltage lead-in at the lower end of the rods, while the actual drive elements for rotating the rods are electrically insulated therefrom by suitable ceramic insulating elements.

摘要翻译： 适用于三维工件的旋转驱动。 在这种旋转装置中，仅用作样品保持器的可移除安装的可旋转杆连接到高压，高压通过杆的下端的中心高压引入而传递，而用于旋转 棒通过合适的陶瓷绝缘元件与其电绝缘。