Invention Grant
US06495216B2 Apparatus and method for electron beam evaporation 失效
电子束蒸发的装置和方法

  • Patent Title: Apparatus and method for electron beam evaporation
  • Patent Title (中): 电子束蒸发的装置和方法
  • Application No.: US08876887
    Application Date: 1997-06-16
  • Publication No.: US06495216B2
    Publication Date: 2002-12-17
  • Inventor: Stefan LocherEckhard Wirth
  • Applicant: Stefan LocherEckhard Wirth
  • Priority: DE19623701 19960614
  • Main IPC: C23C1430
  • IPC: C23C1430
Apparatus and method for electron beam evaporation
Abstract:
Disclosed is an electron beam evaporator for installation in a vacuum apparatus which provides for variable positioning during or between applications of a coating. The apparatus has a carrier plate which is a flat hollow body, the top cover plate of which supports the evaporator. The hollow body is disposed over the bore in the tank such that it can be turned about the main axis of the bore. The component assemblies of the electron beam evaporator are vacuum-tight on the cover plate and the connecting lines are carried through the interior of the hollow body to the component assemblies.
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