发明授权
US06495838B1 Sample heating holder, method of observing a sample and charged particle beam apparatus
有权
样品加热器,观察样品和带电粒子束装置的方法
- 专利标题: Sample heating holder, method of observing a sample and charged particle beam apparatus
- 专利标题(中): 样品加热器,观察样品和带电粒子束装置的方法
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申请号: US09354633申请日: 1999-07-16
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公开(公告)号: US06495838B1公开(公告)日: 2002-12-17
- 发明人: Toshie Yaguchi , Takeo Kamino , Masahiro Tomita , Kishio Hidaka
- 申请人: Toshie Yaguchi , Takeo Kamino , Masahiro Tomita , Kishio Hidaka
- 优先权: JP10-207556 19980723
- 主分类号: H01J3720
- IPC分类号: H01J3720
摘要:
High resolution observation of a sample at a high temperature above 1000° C. is accomplished by suppressing sample drift by heating over a short time and with small electric current. A heater envelope made of a ceramic having a carbon coating on the surface is attached around a heater surrounding the sample. The heater envelope is rotatable around pivot screws, and has an outer frame portion of a holder individually having slots capable of letting an FIB enter so that the sample mounting on the holder, as it is, may be milled with the FIB.
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