发明授权
US06495838B1 Sample heating holder, method of observing a sample and charged particle beam apparatus 有权
样品加热器,观察样品和带电粒子束装置的方法

Sample heating holder, method of observing a sample and charged particle beam apparatus
摘要:
High resolution observation of a sample at a high temperature above 1000° C. is accomplished by suppressing sample drift by heating over a short time and with small electric current. A heater envelope made of a ceramic having a carbon coating on the surface is attached around a heater surrounding the sample. The heater envelope is rotatable around pivot screws, and has an outer frame portion of a holder individually having slots capable of letting an FIB enter so that the sample mounting on the holder, as it is, may be milled with the FIB.
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