公开(公告)号：US07622714B2

公开(公告)日：2009-11-24

申请号：US11717094

申请日：2007-03-13

申请人： Toshie Yaguchi ,  Takeo Kamino ,  Yoshifumi Taniguchi

发明人： Toshie Yaguchi ,  Takeo Kamino ,  Yoshifumi Taniguchi

IPC分类号： H01J37/26 ,  G01N1/28 ,  G01D18/00

CPC分类号： G01N23/04 ,  B82Y15/00 ,  G01N2223/303 ,  G01N2223/3037 ,  H01J37/263 ,  H01J2237/2826 ,  H01J2237/31745

摘要： An object of the present invention is to provide a standard specimen for a charged particle beam enabling highly precise measurement of sub-micron to several 10 μm in size on an image and an apparatus using the standard specimen. In order to attain the above described object, the present invention provides a standard specimen for a charged particle beam including two different specimens for magnification or measurement calibration and a charged particle beam apparatus using the specimens.

摘要翻译： 本发明的目的是提供一种用于带电粒子束的标准样品，其使得能够在图像上的亚微米至数十微米的尺寸上高精度地测量，并且使用标准样品。 为了达到上述目的，本发明提供一种包含两个不同的用于放大或测量校准的样品的带电粒子束的标准样品和使用该样品的带电粒子束装置。

公开(公告)号：US06495838B1

公开(公告)日：2002-12-17

申请号：US09354633

申请日：1999-07-16

申请人： Toshie Yaguchi ,  Takeo Kamino ,  Masahiro Tomita ,  Kishio Hidaka

发明人： Toshie Yaguchi ,  Takeo Kamino ,  Masahiro Tomita ,  Kishio Hidaka

IPC分类号： H01J3720

CPC分类号： H01J37/20 ,  H01J2237/2001

摘要： High resolution observation of a sample at a high temperature above 1000° C. is accomplished by suppressing sample drift by heating over a short time and with small electric current. A heater envelope made of a ceramic having a carbon coating on the surface is attached around a heater surrounding the sample. The heater envelope is rotatable around pivot screws, and has an outer frame portion of a holder individually having slots capable of letting an FIB enter so that the sample mounting on the holder, as it is, may be milled with the FIB.

摘要翻译： 在高于1000℃的高温下对样品的高分辨率观察是通过在短时间和小电流下加热来抑制样品漂移来实现的。 在表面附近具有碳涂层的陶瓷制成的加热器外壳附着在围绕样品的加热器周围。 加热器外壳可围绕枢轴螺钉旋转，并且具有一个保持器的外框架部分，其单独具有能够使FIB进入的槽，使得可以将保持器上安装在样品架上的样品与FIB一起研磨

公开(公告)号：US5296669A

公开(公告)日：1994-03-22

申请号：US69192

申请日：1993-05-28

申请人： Hiroyuki Kobayashi ,  Takeo Kamino ,  Masahiro Tomita

发明人： Hiroyuki Kobayashi ,  Takeo Kamino ,  Masahiro Tomita

IPC分类号： H01J37/20 ,  H05B3/12 ,  H05B3/02

CPC分类号： H05B3/12 ,  H01J37/20

摘要： A specimen to be irradiated with an electron beam is supported by a heating member secured detachably to a specimen holder and the heating member, a power supply therefor and electric conductive lines for conducting a electric power from the power supply to the heating member are integrated into the specimen holder.

摘要翻译： 用电子束照射的试样由可拆卸地固定在试样支架上的加热构件支撑，加热构件，用于其的电源和用于从电源向加热构件传导电力的导电线被集成到 样品架。

公开(公告)号：US08604429B2

公开(公告)日：2013-12-10

申请号：US13201820

申请日：2010-01-20

申请人： Toshie Yaguchi ,  Yasuhira Nagakubo ,  Takeo Kamino ,  Akira Watabe

发明人： Toshie Yaguchi ,  Yasuhira Nagakubo ,  Takeo Kamino ,  Akira Watabe

IPC分类号： H01J37/08 ,  H01J37/18

CPC分类号： H01J37/20 ,  H01J2237/006 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2004

摘要： An object of the invention is to provide an electron beam device and a sample holding device for the electron beam device that can observe the reaction between a sample and a gas at high resolution while a gas atmosphere is maintained even by using thin diaphragms.To solve one of the problems described above, in an electron beam device having the function of separately exhausting an electron beam irradiation portion of an optical column, a sample chamber and an observation chamber, a gas supply means for supplying a gas to a sample and an exhaust means for exhausting a gas are provided to sample holding means, diaphragms are disposed above and below the sample to separate the gas atmosphere and vacuum of the sample chamber and to constitute a cell sealing the atmosphere around the sample, and a mechanism for spraying a gas is provided to the outside of the diaphragms. The gas sprayed outside the diaphragms has low electron beam scattering performance such as hydrogen, oxygen or nitrogen. The diaphragm is an amorphous film formed of a light element such as a carbon film, an oxide film and a nitride film capable of transmitting the electron beam.

摘要翻译： 本发明的目的是提供一种用于电子束装置的电子束装置和样品保持装置，其可以在通过使用薄隔膜保持气体气氛的同时以高分辨率观察样品和气体之间的反应。 为了解决上述问题之一，在具有分别排出光学柱的电子束照射部分，样品室和观察室的功能的电子束装置中，向样品供应气体的气体供给装置和 向样品保持装置提供用于排出气体的排气装置，在样品上方和下方设置隔膜以分离样品室的气体气氛和真空，并构成密封样品周围的气氛的单元，以及用于喷射的机构 气体被提供到隔膜的外部。 喷射在隔膜外部的气体具有低电子束散射性能，例如氢，氧或氮。 隔膜是由诸如碳膜，氧化膜和能够透射电子束的氮化物膜的光元件形成的非晶膜。

公开(公告)号：US20120295184A1

公开(公告)日：2012-11-22

申请号：US13512205

申请日：2010-11-26

申请人： Masahiro Watanabe ,  Katsuyoshi Kakinuma ,  Makoto Uchida ,  Takeo Kamino ,  Hiroyuki Uchida

发明人： Masahiro Watanabe ,  Katsuyoshi Kakinuma ,  Makoto Uchida ,  Takeo Kamino ,  Hiroyuki Uchida

IPC分类号： H01M4/90 ,  H01M4/86

CPC分类号： H01M4/86 ,  B01J23/002 ,  B01J23/10 ,  B01J23/14 ,  B01J23/18 ,  H01M2008/1095

摘要： Disclosed is an oxide and/or nitride support for electrode catalysts, which is used for electrodes for polymer electrolyte fuel cells (PEFC). The support for electrode catalysts is an aggregation body of primary particles of oxide of at least one kind of metal selected from rare earths, alkaline earths, transition metals, niobium, bismuth, tin, antimony, zirconium, molybdenum, indium, tantalum, and tungsten, and the aggregation body is configured such that at least 80% of the metal oxide primary particles having a size of 5 nm to 100 nm aggregate and bind each other to form dendritic or chain structures each of which is made of 5 or more of the metal oxide primary particles.

摘要翻译： 公开了用于电极催化剂的氧化物和/或氮化物载体，其用于聚合物电解质燃料电池（PEFC）的电极。 电极催化剂的载体是选自稀土，碱土金属，过渡金属，铌，铋，锡，锑，锆，钼，铟，钽和钨中的至少一种金属的氧化物的一次粒子的聚集体 并且聚集体被配置为使得至少80％的尺寸为5nm至100nm的金属氧化物一次粒子聚集并彼此结合以形成树突状结构或链结构，其每一个由5个或更多个 金属氧化物一次粒子。

公开(公告)号：US20080073521A1

公开(公告)日：2008-03-27

申请号：US11717094

申请日：2007-03-13

申请人： Toshie Yaguchi ,  Takeo Kamino ,  Yoshifumi Taniguchi

发明人： Toshie Yaguchi ,  Takeo Kamino ,  Yoshifumi Taniguchi

IPC分类号： G01N23/00

CPC分类号： G01N23/04 ,  B82Y15/00 ,  G01N2223/303 ,  G01N2223/3037 ,  H01J37/263 ,  H01J2237/2826 ,  H01J2237/31745

摘要： An object of the present invention is to provide a standard specimen for a charged particle beam enabling highly precise measurement of sub-micron to several 10 μm in size on an image and an apparatus using the standard specimen. In order to attain the above described object, the present invention provides a standard specimen for a charged particle beam including two different specimens for magnification or measurement calibration and a charged particle beam apparatus using the specimens.

摘要翻译： 本发明的目的是提供一种用于带电粒子束的标准样品，其使得能够在图像上的亚微米至数十微米的尺寸上高精度地测量，并且使用标准样品。 为了达到上述目的，本发明提供一种包含两个不同的用于放大或测量校准的样品的带电粒子束的标准样品和使用该样品的带电粒子束装置。

公开(公告)号：US20070187597A1

公开(公告)日：2007-08-16

申请号：US11654685

申请日：2007-01-18

申请人： Yuya Suzuki ,  Takeo Kamino ,  Toshie Yaguchi ,  Mitsuru Konno ,  Tsuyoshi Ohnishi

发明人： Yuya Suzuki ,  Takeo Kamino ,  Toshie Yaguchi ,  Mitsuru Konno ,  Tsuyoshi Ohnishi

IPC分类号： G21K7/00

CPC分类号： H01J37/3056 ,  H01J37/3005 ,  H01J2237/2516 ,  H01J2237/31745

摘要： A focused ion beam system capable of acquiring surface structure information, internal structure information, and internal composition information about a sample simultaneously from the same field of view of the sample. A method of sample preparation and observation employs such focused ion beam system to accurately set a sample processing position based on information about the structure and composition of the sample acquired from multiple directions of the sample, and to process and observe the sample. The system includes, in order to acquire the sample structure and composition information simultaneously, a secondary electron detector, a transmission electron detector, and an energy dispersive X-ray spectroscope or an electron energy loss spectroscope, and employs a stub having the sample rotating and tilting function. The method includes a marking process.

摘要翻译： 一种聚焦离子束系统，能够从样品的同一视野同时获取关于样品的表面结构信息，内部结构信息和内部组成信息。 样品制备和观察的方法使用这种聚焦离子束系统基于从样品的多个方向获得的样品的结构和组成的信息来精确地设置样品处理位置，并且处理和观察样品。 为了同时获取样品结构和组成信息，该系统包括二次电子检测器，透射电子检测器和能量色散X射线分光镜或电子能量损失光谱仪，并且使用具有样品旋转的短截线和 倾斜功能。 该方法包括标记过程。

公开(公告)号：US06992286B2

公开(公告)日：2006-01-31

申请号：US10792781

申请日：2004-03-05

申请人： Toshie Yaguchi ,  Takeo Kamino ,  Yoshifumi Taniguchi

发明人： Toshie Yaguchi ,  Takeo Kamino ,  Yoshifumi Taniguchi

IPC分类号： G01N23/203

CPC分类号： G01N23/2252 ,  G01N23/20 ,  H01J37/244 ,  H01J37/256 ,  H01J37/28

摘要： An electron beam device is provided with an electron beam diffraction image analysis section for calculation of the lattice distance from the diffraction image taken into by the TV camera for observation of the electron beam diffraction image, the EDX analysis section for acquiring a composition of the material, the data base for retrieval of material characterization, and the material characterization section having the data base retrieval function. The material characterization section characterizes the material by retrieving the retrieval data base, based upon the lattice distance data transferred from the electron beam diffraction image analysis section and the element data transferred from the EDX analysis sectio.

摘要翻译： 电子束装置设有电子束衍射图像分析部，用于计算由用于观察电子束衍射图像的TV摄像机拍摄的衍射图像的晶格距离，用于获取材料成分的EDX分析部 ，用于材料表征检索的数据库，以及具有数据库检索功能的材料表征部分。 材料表征部分通过基于从电子束衍射图像分析部分传送的晶格距离数据和从EDX分析部分传送的元素数据来检索检索数据库来表征材料。

公开(公告)号：US20110303845A1

公开(公告)日：2011-12-15

申请号：US13201820

申请日：2010-01-20

申请人： Toshie Yaguchi ,  Yasuhira Nagakubo ,  Takeo Kamino ,  Akira Watabe

发明人： Toshie Yaguchi ,  Yasuhira Nagakubo ,  Takeo Kamino ,  Akira Watabe

IPC分类号： H01J37/26

CPC分类号： H01J37/20 ,  H01J2237/006 ,  H01J2237/2002 ,  H01J2237/2003 ,  H01J2237/2004

摘要： An object of the invention is to provide an electron beam device and a sample holding device for the electron beam device that can observe the reaction between a sample and a gas at high resolution while a gas atmosphere is maintained even by using thin diaphragms.To solve one of the problems described above, in an electron beam device having the function of separately exhausting an electron beam irradiation portion of an optical column, a sample chamber and an observation chamber, a gas supply means for supplying a gas to a sample and an exhaust means for exhausting a gas are provided to sample holding means, diaphragms are disposed above and below the sample to separate the gas atmosphere and vacuum of the sample chamber and to constitute a cell sealing the atmosphere around the sample, and a mechanism for spraying a gas is provided to the outside of the diaphragms. The gas sprayed outside the diaphragms has low electron beam scattering performance such as hydrogen, oxygen or nitrogen. The diaphragm is an amorphous film formed of a light element such as a carbon film, an oxide film and a nitride film capable of transmitting the electron beam.

摘要翻译： 本发明的目的是提供一种用于电子束装置的电子束装置和样品保持装置，其可以在通过使用薄隔膜保持气体气氛的同时以高分辨率观察样品和气体之间的反应。 为了解决上述问题之一，在具有分别排出光学柱的电子束照射部分，样品室和观察室的功能的电子束装置中，向样品供应气体的气体供给装置和 向样品保持装置提供用于排出气体的排气装置，在样品上方和下方设置隔膜以分离样品室的气体气氛和真空，并构成密封样品周围的气氛的单元，以及用于喷射的机构 气体被提供到隔膜的外部。 喷射在隔膜外部的气体具有低电子束散射性能，例如氢，氧或氮。 隔膜是由诸如碳膜，氧化膜和能够透射电子束的氮化物膜的光元件形成的非晶膜。

公开(公告)号：US07612337B2

公开(公告)日：2009-11-03

申请号：US11654685

申请日：2007-01-18

申请人： Yuya Suzuki ,  Takeo Kamino ,  Toshie Yaguchi ,  Mitsuru Konno ,  Tsuyoshi Ohnishi

发明人： Yuya Suzuki ,  Takeo Kamino ,  Toshie Yaguchi ,  Mitsuru Konno ,  Tsuyoshi Ohnishi

IPC分类号： H01J37/26 ,  G01N23/22

CPC分类号： H01J37/3056 ,  H01J37/3005 ,  H01J2237/2516 ,  H01J2237/31745

摘要： A focused ion beam system capable of acquiring surface structure information, internal structure information, and internal composition information about a sample simultaneously from the same field of view of the sample. A method of sample preparation and observation employs such focused ion beam system to accurately set a sample processing position based on information about the structure and composition of the sample acquired from multiple directions of the sample, and to process and observe the sample. The system includes, in order to acquire the sample structure and composition information simultaneously, a secondary electron detector, a transmission electron detector, and an energy dispersive X-ray spectroscope or an electron energy loss spectroscope, and employs a stub having the sample rotating and tilting function. The method includes a marking process.

摘要翻译： 一种聚焦离子束系统，能够从样品的同一视野同时获取关于样品的表面结构信息，内部结构信息和内部组成信息。 样品制备和观察的方法使用这种聚焦离子束系统基于从样品的多个方向获得的样品的结构和组成的信息来精确地设置样品处理位置，并且处理和观察样品。 为了同时获取样品结构和组成信息，该系统包括二次电子检测器，透射电子检测器和能量色散X射线分光镜或电子能量损失光谱仪，并且使用具有样品旋转的短截线和 倾斜功能。 该方法包括标记过程。