发明授权
US06496958B1 Yield prediction and statistical process control using predicted defect related yield loss
有权
产量预测和统计过程控制采用预测的缺陷相关产量损失
- 专利标题： Yield prediction and statistical process control using predicted defect related yield loss
- 专利标题（中）： 产量预测和统计过程控制采用预测的缺陷相关产量损失
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申请号： US09299979申请日： 1999-04-27
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公开(公告)号： US06496958B1公开(公告)日： 2002-12-17
- 发明人: Reinhold Ott , Herbert Lammering , Heinrich Ollendorf
- 申请人： Reinhold Ott , Herbert Lammering , Heinrich Ollendorf
- 主分类号： G06F1750
- IPC分类号： G06F1750
摘要：
In accordance with the present invention, a method, which may be implemented by employing a program storage device, for determining yield loss for a device includes the steps of determining killing probabilities corresponding to values of inspection parameters based on historic inspection information, determining defects on the device and ordering the defects by classifying the defects according to the inspection parameters. The defects adopt the killing probabilities associated with the same values of the inspection parameters. The method further includes the step of calculating a predicted yield loss based on the defects and the adopted killing probabilities. The method further includes the step of applying statistical process control to the predicted yield loss for all in-line inspection (process) steps.
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