发明授权
- 专利标题： Synthesis of layers, coatings or films using precursor layer exerted pressure containment
- 专利标题（中）： 使用前体层的层，涂层或膜的合成施加压力容纳
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申请号： US09957132申请日： 2001-09-20
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公开(公告)号： US06500733B1公开(公告)日： 2002-12-31
- 发明人: Billy J. Stanbery
- 申请人： Billy J. Stanbery
- 主分类号： H01L2130
- IPC分类号： H01L2130
摘要：
Systems and methods are described for synthesis of films, coatings or layers using precursor exerted pressure containment. A method includes exerting a pressure between a first precursor layer that is coupled to a first substrate and a second precursor layer that is coupled to a second substrate; forming a composition layer; and moving the first substrate relative to the second substrate, wherein the composition layer remains coupled to the second substrate.
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