发明授权
- 专利标题: Ion extraction assembly
- 专利标题(中): 离子提取组件
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申请号: US09527031申请日: 2000-03-16
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公开(公告)号: US06501078B1公开(公告)日: 2002-12-31
- 发明人: Geoffrey Ryding , Theodore H. Smick , Marvin Farley , Takao Sakase
- 申请人: Geoffrey Ryding , Theodore H. Smick , Marvin Farley , Takao Sakase
- 主分类号: H01J3715
- IPC分类号: H01J3715
摘要:
An ion electrode extraction assembly comprising an ion source 20 and at least one electrode 50 having a gap through which a beam of extracted ions passes in use. An electrode manipulator assembly 55 is provided to move the electrode so as to vary the width of the gap transversely to the ion beam, move the electrode transversely to the ion beam, and move the electrode in the direction of the ion beam. The three degrees of movement being carried out independently of one another.
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