发明授权
- 专利标题： Centrifuge and method for centrifuging a semiconductor wafer
- 专利标题（中）： 离心机和离心半导体晶片的方法
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申请号： US09426916申请日： 1999-10-26
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公开(公告)号： US06503335B2公开(公告)日： 2003-01-07
- 发明人: Georg-Friedrich Hohl , Roland Brunner , Susanne Bauer-Mayer , Günther Brunner , Hans-Joachim Luthe , Franz Sollinger
- 申请人： Georg-Friedrich Hohl , Roland Brunner , Susanne Bauer-Mayer , Günther Brunner , Hans-Joachim Luthe , Franz Sollinger
- 优先权： DE19852303 19981112; DE19923385 19990521
- 主分类号： B08B700
- IPC分类号： B08B700
摘要：
A centrifuge for a semiconductor wafer has a centrifuge plate for holding a semiconductor wafer, has a drive for setting the centrifuge plate in rotation, and has a device for supplying a medium to a front side and a rear side of the semiconductor wafer. The centrifuge has a housing which separates a centrifuging area and the semiconductor wafer from the environment, and a device for generating a laminar gas flow in the housing. A method for centrifuging a semiconductor wafer has the semiconductor wafer being centrifuged in a laminar gas flow.
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