发明授权
- 专利标题: Positive working photoresist composition
- 专利标题(中): 正工作光致抗蚀剂组成
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申请号: US09698221申请日: 2000-10-30
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公开(公告)号: US06506535B1公开(公告)日: 2003-01-14
- 发明人: Kazuyoshi Mizutani , Kenichiro Sato , Kunihiko Kodama
- 申请人: Kazuyoshi Mizutani , Kenichiro Sato , Kunihiko Kodama
- 优先权: JP11-307317 19991028; JP11-331785 19991122; JP11-338487 19991129; JP11-343714 19991202
- 主分类号: G03C172
- IPC分类号: G03C172
摘要:
Disclosed is a positive working photoresist composition comprising an acid-decomposable polymer containing at least a repeating unit represented by the following formula (I) and at least either one repeating unit represented by the following formula (IIa) or (IIb), and also disclosed is a positive working photoresist composition comprising (A) a compound capable of generating an acid upon irradiation with actinic rays or radiation, (B) an acid-decomposable polymer containing at least a repeating unit represented by the following formula (I) and at least either one repeating unit represented by the following formula (IIa) or (IIb), (C) at least one solvent capable of dissolving the components (A) and (B), (D) an organic basic compound and (E) at least one surfactant selected from fluorine-containing surfactants, silicon-containing surfactants and nonionic surfactants:
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