Invention Grant
- Patent Title: Integrated surface-emitting optoelectronic module and the method for making the same
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Application No.: US09745152Application Date: 2000-12-19
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Publication No.: US06511235B2Publication Date: 2003-01-28
- Inventor: Weng-Jin Wu , Yih-Der Guo , Tsung-Hsuan Chiu , Rong-Heng Yuang , Mu-Tao Chu
- Applicant: Weng-Jin Wu , Yih-Der Guo , Tsung-Hsuan Chiu , Rong-Heng Yuang , Mu-Tao Chu
- Priority: TW89119590 20000922
- Main IPC: G02B636
- IPC: G02B636

Abstract:
The present invention pertains to an integrated surface-emitting optoelectronic module and the method for making the same. The yellow light procedure is performed to define a V-groove width for disposing an optical fiber on a silicon substrate. After dry etching a vertical groove, a dielectric layer is grown on the surface of the silicon substrate to protect the vertical wall, preventing the groove from getting wider due to subsequent wet etching. A 45-degree mirror surface is formed so that an optoelectronic device can be disposed on the mirror surface in the flip chip method. The optoelectronic module employs a complete silicon substrate to assemble a surface-emitting optoelectronic devices and an optical fiber by passive alignment, and therefore can be free from misalignment due to separate assembly.
Public/Granted literature
- US20020037137A1 Integrated surface-emitting optoelectronic module and the method for making the same Public/Granted day:2002-03-28
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