发明授权
US06512631B2 Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system
有权
宽带深紫外/真空紫外线反射折射成像系统
- 专利标题: Broad-band deep ultraviolet/vacuum ultraviolet catadioptric imaging system
- 专利标题(中): 宽带深紫外/真空紫外线反射折射成像系统
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申请号: US09349036申请日: 1999-07-07
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公开(公告)号: US06512631B2公开(公告)日: 2003-01-28
- 发明人: David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
- 申请人: David R. Shafer , Yung-Ho Chuang , J. Joseph Armstrong
- 主分类号: G02B1314
- IPC分类号: G02B1314
摘要:
A design for inspecting specimens, such as photomasks, for unwanted particles and features such as pattern defects is provided. The system provides no central obscuration, an external pupil for aperturing and Fourier filtering, and relatively relaxed manufacturing tolerances, and is suited for both broad-band bright-field and laser dark field imaging and inspection at wavelengths below 365 nm. In many instances, the lenses used may be fashioned or fabricated using a single material. Multiple embodiments of the objective lensing arrangement are disclosed, all including at least one small fold mirror and a Mangin mirror. The system is implemented off axis such that the returning second image is displaced laterally from the first image so that the lateral separation permits optical receipt and manipulation of each image separately. The objective designs presented have the optical axis of the Mangin mirror image relay at ninety degrees to the optical axis defined by the focusing lenses, or an in-line or straight objective having one ninety degree bend of light rays.
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