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公开(公告)号：US20130077086A1
公开(公告)日：2013-03-28
申请号：US13558318
申请日：2012-07-25
CPC分类号： G01N21/9501 , G01J3/10 , G01J3/1256 , G01N2021/8825 , G01N2021/95676 , G02F1/3501 , G02F1/3532 , G02F2001/3507 , G02F2001/354 , G03F1/84 , G03F7/70025 , G03F7/7065 , H01S3/0092 , H01S3/06754 , H01S3/1618 , H01S3/302
摘要： An improved solid-state laser for generating 193 nm light is described. This laser uses the 6th harmonic of a fundamental wavelength near 1160 nm to generate the 193 nm light. The laser mixes the 1160 nm fundamental wavelength with the 5th harmonic, which is at a wavelength of approximately 232 nm. By proper selection of non-linear media, such mixing can be achieved by nearly non-critical phase matching. This mixing results in high conversion efficiency, good stability, and high reliability.
摘要翻译： 描述了用于产生193nm光的改进的固态激光器。 该激光器使用1160nm附近的基波的6次谐波来产生193nm的光。 激光器将1160nm基波长与波长约为232nm的5次谐波混合。 通过适当选择非线性介质，可以通过几乎非关键的相位匹配来实现这种混合。 这种混合导致高转换效率，良好的稳定性和高可靠性。
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2.发明申请公开(公告)号：US20120314286A1
公开(公告)日：2012-12-13
申请号：US13487075
申请日：2012-06-01
申请人： Yung-Ho Chuang , J. Joseph Armstrong , Justin Dianhuan Liou , Vladimir Dribinski , David L. Brown
发明人： Yung-Ho Chuang , J. Joseph Armstrong , Justin Dianhuan Liou , Vladimir Dribinski , David L. Brown
IPC分类号： G02B27/28
CPC分类号： H01S3/0057 , G01N21/21 , G01N21/9501 , G01N2201/06113 , G01N2201/0683 , G01N2201/0697 , G02B5/0816 , G02B5/3083 , G02B27/281 , G02B27/283 , G02B27/286 , H01S3/083
摘要： A pulse multiplier includes a polarizing beam splitter, a wave plate, and a set of mirrors. The polarizing beam splitter receives an input laser pulse. The wave plate receives light from the polarized beam splitter and generates a first set of pulses and a second set of pulses. The first set of pulses has a different polarization than the second set of pulses. The polarizing beam splitter, the wave plate, and the set of mirrors create a ring cavity. The polarizing beam splitter transmits the first set of pulses as an output of the pulse multiplier and reflects the second set of pulses into the ring cavity. This pulse multiplier can inexpensively reduce the peak power per pulse while increasing the number of pulses per second with minimal total power loss.
摘要翻译： 脉冲倍增器包括偏振分束器，波片和一组反射镜。 偏振分束器接收输入激光脉冲。 波片从偏振分束器接收光，并产生第一组脉冲和第二组脉冲。 第一组脉冲具有与第二组脉冲不同的极化。 偏振分束器，波片和一组反射镜产生环形腔。 偏振分束器将第一组脉冲发射为脉冲乘法器的输出，并将第二组脉冲反射到环形腔中。 该脉冲倍增器可以以最小的总功率损耗来降低每脉冲的峰值功率，同时增加每秒的脉冲数。
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3.发明申请EUV High Throughput Inspection System For Defect Detection On Patterned EUV Masks, Mask Blanks, And Wafers 有权EUV高通量检测系统，用于在图案化的EUV面罩，面罩空白和晶圆上进行缺陷检测公开(公告)号：US20110116077A1
公开(公告)日：2011-05-19
申请号：US12812950
申请日：2010-06-18
申请人： Yung-Ho Chuang , Richard W. Solarz , David R. Shafer , Bing-Ming Benjamin Tsai , David L. Brown
发明人： Yung-Ho Chuang , Richard W. Solarz , David R. Shafer , Bing-Ming Benjamin Tsai , David L. Brown
IPC分类号： G01N21/956
CPC分类号： G01N21/95 , G01N21/8806 , G01N21/9501 , G01N21/956 , G01N2021/95676 , G01N2201/068 , G03F1/84 , G03F7/70616 , H05G2/008
摘要： Inspection of EUV patterned masks, blank masks, and patterned wafers generated by EUV patterned masks requires high magnification and a large field of view at the image plane. An EUV inspection system can include a light source directed to an inspected surface, a detector for detecting light deflected from the inspected surface, and an optic configuration for directing the light from the inspected surface to the detector. In particular, the detector can include a plurality of sensor modules. Additionally, the optic configuration can include a plurality of mirrors that provide magnification of at least 100× within an optical path less than 5 meters long. In one embodiment, the optical path is approximately 2-3 meters long.
摘要翻译： 对EUV图案化掩模，空白掩模和由EUV图案化掩模生成的图案化晶片的检查需要高倍率和在图像平面上的大视场。 EUV检查系统可以包括指向检查表面的光源，用于检测从被检查表面偏转的光的检测器和用于将来自被检查表面的光引导到检测器的光学配置。 特别地，检测器可以包括多个传感器模块。 另外，光学配置可以包括在小于5米长的光路内提供至少100倍的放大倍数的多个反射镜。 在一个实施例中，光路大约2-3米长。
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4.发明授权Beam delivery system for laser dark-field illumination in a catadioptric optical system 有权反射折射光学系统激光暗场照明光束传输系统公开(公告)号：US07817260B2
公开(公告)日：2010-10-19
申请号：US12074405
申请日：2008-03-03
IPC分类号： G01N21/00
CPC分类号： G02B21/10 , G02B17/0856
摘要： A method and apparatus for inspecting a specimen are provided. The apparatus comprises a primary illumination source, a catadioptric objective exhibiting central obscuration that directs light energy received from the primary illumination source at a substantially normal angle toward the specimen, and an optical device, such as a prism or reflective surface, positioned within the central obscuration resulting from the catadioptric objective for receiving further illumination from a secondary illumination source and diverting the further illumination to the specimen. The method comprises illuminating a surface of the specimen at a variety of angles using a primary illumination source, illuminating the surface using a secondary illumination source, the illuminating by the secondary illumination source occurring at a substantially normal angle of incidence; and imaging all reflected, scattered, and diffracted light energy received from the surface onto a detector.
摘要翻译： 提供了一种用于检查样本的方法和装置。 该装置包括初级照明源，显示中心遮蔽的反折射物镜，其将从主照明源接收的光能以基本上垂直的角度朝向样本引导，以及位于中心内的光学装置，例如棱镜或反射表面 由反射折射物镜产生的遮挡，用于接收来自次级照明源的进一步照明并将另外的照明转移到样本。 该方法包括使用主照明源以各种角度照射样本的表面，使用次级照明源照亮表面，由次级照明源以基本上正常入射角发生的照明; 并将从表面接收的所有反射，散射和衍射的光能成像到检测器上。
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公开(公告)号：US07679842B2
公开(公告)日：2010-03-16
申请号：US11543519
申请日：2006-10-04
IPC分类号： G02B9/00
CPC分类号： G02B17/0892 , G02B17/0812 , G02B17/0856 , G02B21/04 , G03F7/70225 , G03F7/70341
摘要： A reduced size catadioptric objective and system is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range. Elements are less than 100 mm in diameter. The objective comprises a focusing lens group configured to receive the light energy, at least one field lens oriented to receive focused light energy from the focusing lens group and provide intermediate light energy, and a Mangin mirror arrangement positioned to receive the intermediate light energy from the field lens and form controlled light energy for transmission to a specimen. The Mangin mirror arrangement imparts controlled light energy with a numerical aperture in excess of 0.65 and up to approximately 0.90, and the design may be employed in various environments.
摘要翻译： 公开了一种减小尺寸的反射折射物镜和系统。 该目的可以通过红外光范围具有在约190纳米范围内的波长的光能。 元件的直径小于100毫米。 该目的包括被配置为接收光能的聚焦透镜组，至少一个取向为从聚焦透镜组接收聚焦光能并提供中间光能的场透镜，以及设置成接收来自光源的中间光能 并且形成用于传输到样本的受控光能。 芒格镜配置赋予数值孔径超过0.65并且高达约0.90的受控光能，并且该设计可以用于各种环境中。
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6.发明授权Catadioptric imaging system employing immersion liquid for use in broad band microscopy 有权使用浸没液的反射折射成像系统用于宽带显微镜公开(公告)号：US07633675B2
公开(公告)日：2009-12-15
申请号：US11999558
申请日：2007-12-05
IPC分类号： G02B17/08
CPC分类号： G03F7/70341 , G02B17/023 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G02B21/04 , G02B21/33 , G03F7/70225
摘要： A reduced size catadioptric inspection system employing a catadioptric objective and immersion substance is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The objective comprises a focusing lens group, a field lens, a Mangin mirror arrangement, and an immersion substance or liquid between the Mangin mirror arrangement and the specimen. A variable focal length optical system for use with the objective in the catadioptric inspection system is also disclosed.
摘要翻译： 公开了一种使用反射折射物镜和浸没物质的缩小尺寸反射折射检查系统。 该目的可以通过红外光范围具有在约190纳米范围内的波长的光能，并且可以提供超过0.9的数值孔径。 元素的直径小于100毫米，并且可以适合标准显微镜。 该目的包括聚焦透镜组，场透镜，Mangin镜布置以及Mangin镜布置和样品之间的浸没物质或液体。 还公开了用于反射折射检查系统中的目的的可变焦距光学系统。
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公开(公告)号：US07609309B2
公开(公告)日：2009-10-27
申请号：US10992063
申请日：2004-11-18
申请人： David Lee Brown , Yung-Ho Chuang
发明人： David Lee Brown , Yung-Ho Chuang
CPC分类号： H04N5/37206 , H04N5/372
摘要： A method and apparatus for propagating charge through a time division and integration (TDI) sensor is provided. The method and apparatus may be used with the TDI sensor to inspect specimens, the TDI sensor operating to advance an accumulated charge between gates of the TDI sensor. The design comprises controlling voltage waveform shapes for waveforms advancing the accumulated charge between gates in a substantially nonsquare waveform, such as a composite, sinusoidal, or other shaped waveform. Controlling voltage waveform shapes operates at different voltage phases in adjacent gates to provide a substantially de minimis net voltage.
摘要翻译： 提供了一种通过时分和积分（TDI）传感器传播电荷的方法和装置。 该方法和装置可以与TDI传感器一起使用，以检查样品，TDI传感器操作以提前TDI传感器的门之间的累积电荷。 该设计包括控制电压波形形状，用于在基本上非正方形波形（例如复合，正弦波形或其它形状波形）中推进门之间的累积电荷的波形。 控制电压波形形状在相邻门中的不同电压相位下工作，以提供基本上最小的净电压。
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公开(公告)号：US07457034B2
公开(公告)日：2008-11-25
申请号：US11406138
申请日：2006-04-14
CPC分类号： G03F7/7065 , G02B13/12 , G02B13/22 , G02B17/08 , G02B17/0808 , G02B17/0812 , G02B17/0852 , G02B17/0856 , G02B17/0892 , G02B21/16 , G03F1/84 , G03F7/70225 , G03F7/70275 , G03F7/70616
摘要： A system for multiple mode imaging is disclosed. The catadioptric system has an NA greater than 0.65, and preferably greater than 0.9, highly corrected for low and high order monochromatic aberrations. The system employs unique illumination entrances and optics to collect reflected, diffracted, and scattered light over a range of angles. Multiple imaging modes are possible by varying the illumination geometry and apertures at the pupil plane. Illumination can enter the catadioptric optical system using an auxiliary beamsplitter or mirror, or through the catadioptric elements at any angle from 0 to 85 degrees from vertical. The system may employ a relayed pupil plane, used to select different imaging modes, provide simultaneous operation of different imaging modes, Fourier filtering, and other pupil shaping operations.
摘要翻译： 公开了一种用于多模式成像的系统。 反折射系统对于低阶和高阶单色像差具有高于0.65，优选大于0.9的NA。 该系统采用独特的照明入口和光学器件在一定范围的角度收集反射，衍射和散射光。 通过改变光瞳面上的照明几何形状和孔径，可以实现多种成像模式。 照明可以使用辅助分光镜或镜子进入反折射光学系统，或者通过反射折射元件以垂直方向从0到85度的角度进入反折射光学系统。 该系统可以采用中继的光瞳平面，用于选择不同的成像模式，提供不同成像模式，傅立叶滤波和其他光瞳成形操作的同时操作。
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9.发明申请Catadioptric imaging system employing immersion liquid for use in broad band microscopy 有权使用浸没液的反射折射成像系统用于宽带显微镜公开(公告)号：US20080247035A1
公开(公告)日：2008-10-09
申请号：US11999558
申请日：2007-12-05
IPC分类号： G02B17/08
CPC分类号： G03F7/70341 , G02B17/023 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/0892 , G02B21/02 , G02B21/04 , G02B21/33 , G03F7/70225
摘要： A reduced size catadioptric inspection system employing a catadioptric objective and immersion substance is disclosed. The objective may be employed with light energy having a wavelength in the range of approximately 190 nanometers through the infrared light range, and can provide numerical apertures in excess of 0.9. Elements are less than 100 millimeters in diameter and may fit within a standard microscope. The objective comprises a focusing lens group, a field lens, a Mangin mirror arrangement, and an immersion substance or liquid between the Mangin mirror arrangement and the specimen. A variable focal length optical system for use with the objective in the catadioptric inspection system is also disclosed.
摘要翻译： 公开了一种使用反射折射物镜和浸没物质的缩小尺寸反射折射检查系统。 该目的可以通过红外光范围具有在约190纳米范围内的波长的光能，并且可以提供超过0.9的数值孔径。 元素的直径小于100毫米，并且可以适合标准显微镜。 该目的包括聚焦透镜组，场透镜，Mangin镜布置以及Mangin镜布置和样品之间的浸没物质或液体。 还公开了用于反射折射检查系统中的目的的可变焦距光学系统。
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10.发明授权Ultra-broadband UV microscope imaging system with wide range zoom capability 有权超宽带紫外显微镜成像系统具有广泛的变焦能力公开(公告)号：US07423805B2
公开(公告)日：2008-09-09
申请号：US10958242
申请日：2004-10-04
IPC分类号： G02B15/14
CPC分类号： G02B17/0896 , G02B17/023 , G02B17/0808 , G02B17/0812 , G02B17/0856 , G02B17/086 , G02B17/0892 , G02B21/16 , G03F1/84 , G03F7/70225 , G03F7/70275 , G03F7/70616 , G03F7/7065
摘要： An ultra-broadband ultraviolet (UV) catadioptric imaging microscope system with wide-range zoom capability. The microscope system, which comprises a catadioptric lens group and a zooming tube lens group, has high optical resolution in the deep UV wavelengths, continuously adjustable magnification, and a high numerical aperture. The system integrates microscope modules such as objectives, tube lenses and zoom optics to reduce the number of components, and to simplify the system manufacturing process. The preferred embodiment offers excellent image quality across a very broad deep ultraviolet spectral range, combined with an all-refractive zooming tube lens. The zooming tube lens is modified to compensate for higher-order chromatic aberrations that would normally limit performance.
摘要翻译： 超宽带紫外（UV）反折射成像显微镜系统，具有广泛的变焦能力。 包括反射折射透镜组和变焦管透镜组的显微镜系统在深UV波长，连续可调放大倍数和高数值孔径中具有高的光学分辨率。 该系统集成了诸如目标，管镜和变焦光学的显微镜模块，以减少部件数量，并简化系统制造过程。 优选实施例在非常广泛的深紫外光谱范围内提供优异的图像质量，与全折射变焦管透镜组合。 变焦管镜头被修改以补偿通常会限制性能的高阶色差。
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