Invention Grant
- Patent Title: Field-effect-controlled transistor and method for fabricating the transistor
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Application No.: US09861431Application Date: 2001-05-18
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Publication No.: US06515319B2Publication Date: 2003-02-04
- Inventor: Dietrich Widmann , Armin Wieder , Justus Kuhn , Jens Lüpke , Jochen Müller , Peter Pochmüller , Michael Schittenhelm
- Applicant: Dietrich Widmann , Armin Wieder , Justus Kuhn , Jens Lüpke , Jochen Müller , Peter Pochmüller , Michael Schittenhelm
- Priority: DE19853268 19981118
- Main IPC: H01L31119
- IPC: H01L31119

Abstract:
An active surface with a source area, a channel area and a drain area is provided in a semiconductor substrate. Each of the areas lie adjacent to a main surface of the semiconductor substrate. At least one trench is provided in the main surface of the semiconductor substrate. The trench is adjacent to the channel area and is situated in the gate electrode part. The gate electrode preferably has two opposite parts which are each adjacent to the channel area. The transistor is produced using standard process steps.
Public/Granted literature
- US20020014669A1 Field-effect-controlled transistor and method for fabricating the transistor Public/Granted day:2002-02-07
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