发明授权
US06518628B1 Integrated CMOS circuit configuration, and production of same 有权
集成CMOS电路配置,生产相同

Integrated CMOS circuit configuration, and production of same
摘要:
An integrated CMOS circuit arrangement and a method of manufacturing same, which includes both a first MOS transistor and a second MOS transistor complementary thereto, wherein one of the MOS transistors is arranged at the floor of a trench and the other is arranged at the principal surface of a semiconductor substrate. The MOS transistors are arranged relative to one another such that a current flow through the MOS transistors respectively occurs substantially parallel to a sidewall of the trench that is arranged between the MOS transistors.
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