发明授权
- 专利标题： Solid chemical vapor deposition diamond microchannel plate
- 专利标题（中）： 固体化学气相沉积金刚石微通道板
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申请号： US09588457申请日： 2000-06-06
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公开(公告)号： US06521149B1公开(公告)日： 2003-02-18
- 发明人: Gerald T. Mearini , Laszlo A. Takacs
- 申请人： Gerald T. Mearini , Laszlo A. Takacs
- 主分类号： B44C122
- IPC分类号： B44C122
摘要：
A method for manufacturing a free-standing solid diamond microchannel plate produces a base structure, including a silicon material, having a backing and a vertical extension. A chemical vapor deposition diamond material is deposited onto the backing. The diamond material is leveled with the vertical extension of the base structure. The silicon backing is removed from the leveled base structure.
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