发明授权
US06529659B2 Waveguide tunable Bragg grating using compliant microelectromechanical system (MEMS) technology 失效
波导可调布拉格光栅采用符合微机电系统(MEMS)技术

  • 专利标题: Waveguide tunable Bragg grating using compliant microelectromechanical system (MEMS) technology
  • 专利标题(中): 波导可调布拉格光栅采用符合微机电系统(MEMS)技术
  • 申请号: US09832102
    申请日: 2001-04-11
  • 公开(公告)号: US06529659B2
    公开(公告)日: 2003-03-04
  • 发明人: Michael J. LittleJohn Terry Bailey
  • 申请人: Michael J. LittleJohn Terry Bailey
  • 主分类号: G02B634
  • IPC分类号: G02B634
Waveguide tunable Bragg grating using compliant microelectromechanical system (MEMS) technology
摘要:
A low cost waveguide tunable Bragg grating provides a flat passband and minimal crosstalk. A compliant material forms a waveguide that is imprinted with a Bragg grating and mounted on a MEMS actuator. Entropic materials such as elastomers, aerogels or other long-chain polymers may provide the necessary compliance. The application of a drive signal to the actuator deforms (squeezes or stretches) the compliant material thereby changing the Bragg spacing and shifting the resonant wavelength. The MEMS actuator can be an electrostatically or electromagnetically actuated comb-drive.
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