Waveguide tunable Bragg grating using compliant microelectromechanical system (MEMS) technology
    1.
    发明授权
    Waveguide tunable Bragg grating using compliant microelectromechanical system (MEMS) technology 失效
    波导可调布拉格光栅采用符合微机电系统(MEMS)技术

    公开(公告)号:US06529659B2

    公开(公告)日:2003-03-04

    申请号:US09832102

    申请日:2001-04-11

    IPC分类号: G02B634

    摘要: A low cost waveguide tunable Bragg grating provides a flat passband and minimal crosstalk. A compliant material forms a waveguide that is imprinted with a Bragg grating and mounted on a MEMS actuator. Entropic materials such as elastomers, aerogels or other long-chain polymers may provide the necessary compliance. The application of a drive signal to the actuator deforms (squeezes or stretches) the compliant material thereby changing the Bragg spacing and shifting the resonant wavelength. The MEMS actuator can be an electrostatically or electromagnetically actuated comb-drive.

    摘要翻译: 低成本波导可调谐布拉格光栅提供平坦的通带和最小的串扰。 柔性材料形成印有布拉格光栅并安装在MEMS致动器上的波导。 诸如弹性体,气凝胶或其他长链聚合物的熵材料可提供必要的顺应性。 向致动器施加驱动信号使柔性材料变形(挤压或拉伸),从而改变布拉格间隔并移动谐振波长。 MEMS致动器可以是静电或电磁驱动的梳状驱动器。