发明授权
- 专利标题: Method of removing Ti film and apparatus
- 专利标题(中): 去除钛膜及其设备的方法
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申请号: US09381714申请日: 1999-09-28
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公开(公告)号: US06531049B1公开(公告)日: 2003-03-11
- 发明人: Akio Kariya , Takumi Hamajima , Satoshi Morimoto , Toshiaki Ishimaru , Akihide Kakutani
- 申请人: Akio Kariya , Takumi Hamajima , Satoshi Morimoto , Toshiaki Ishimaru , Akihide Kakutani
- 优先权: JP10-031018 19980213
- 主分类号: C25F500
- IPC分类号: C25F500
摘要:
An aqueous solution (20) of an alkali hydroxide is stored and held in a tank (1). An electrode (5) is disposed in the tank (1), and a member (11) coated with a Ti-derived film is disposed in the tank (1) so as to be surrounded with the electrode (5). In this state, a power source (6) applies a negative potential to the electrode (5) and a positive potential to the member (11) to flow electricity between the electrode (5) and the member (11) immersed in the aqueous solution (20). Thus, the Ti-derived film coated on the surface of the member (11) is chemically removed by the aqueous solution (20).
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