Method of removing Ti film and apparatus
    1.
    发明授权
    Method of removing Ti film and apparatus 失效
    去除钛膜及其设备的方法

    公开(公告)号:US06531049B1

    公开(公告)日:2003-03-11

    申请号:US09381714

    申请日:1999-09-28

    IPC分类号: C25F500

    CPC分类号: C25F5/00

    摘要: An aqueous solution (20) of an alkali hydroxide is stored and held in a tank (1). An electrode (5) is disposed in the tank (1), and a member (11) coated with a Ti-derived film is disposed in the tank (1) so as to be surrounded with the electrode (5). In this state, a power source (6) applies a negative potential to the electrode (5) and a positive potential to the member (11) to flow electricity between the electrode (5) and the member (11) immersed in the aqueous solution (20). Thus, the Ti-derived film coated on the surface of the member (11) is chemically removed by the aqueous solution (20).

    摘要翻译: 将碱金属氢氧化物的水溶液(20)储存并保存在罐(1)中。 一个电极(5)设置在罐(1)中,并且涂有Ti衍生膜的部件(11)被设置在罐(1)中以被电极(5)包围。 在该状态下,电源(6)对电极(5)施加负电位,向构件(11)施加正电位,在电极(5)和浸没在水溶液中的构件(11)之间流动 (20)。 因此,通过水溶液(20)化学除去涂布在构件(11)的表面上的Ti衍生的膜。