- 专利标题: Power supply with flux-controlled transformer
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申请号: US09890814申请日: 2001-11-13
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公开(公告)号: US06532161B2公开(公告)日: 2003-03-11
- 发明人: Dmitri Kovalevskii , Michael Kishinevsky , David J. Christie
- 申请人: Dmitri Kovalevskii , Michael Kishinevsky , David J. Christie
- 主分类号: H02M7122
- IPC分类号: H02M7122
摘要:
There is provided by this invention an apparatus and method for generating voltage pulses to first and second magnetron devices in a plasma chamber. An isolation transformer is connected to a pulsed DC power supply having a flux sensor, such as a Hall effect sensor, in close proximity to its air gap to monitor the transformer flux. A control circuit is connected to the flux sensor to control the duty cycle of the transformer by controlling the flux of the transformer such that the maximum and minimum peak transformer fluxes are equal in magnitude and opposite in sign to prevent saturation.
公开/授权文献
- US20020158616A1 Power supply with flux-controlled transformer 公开/授权日:2002-10-31