发明授权
- 专利标题： Surface acoustic wave device, shear bulk wave transducer, and longitudinal bulk wave transducer
- 专利标题（中）： 表面声波装置，剪切体波换能器和纵向体波换能器
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申请号： US09842330申请日： 2001-04-24
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公开(公告)号： US06534895B2公开(公告)日： 2003-03-18
- 发明人: Michio Kadota , Toshinori Miura
- 申请人： Michio Kadota , Toshinori Miura
- 优先权： JP2000-132565 20000501
- 主分类号： H03H925
- IPC分类号： H03H925
摘要：
A surface acoustic wave device includes a substrate and electrode disposed on the substrate. The electrode has a specific resistance &rgr; of up to about 1 &OHgr;·cm and is made of a ZnO film with a low resistance having an impurity doping. A piezoelectric film having a specific resistance &rgr; of at least about 106 &OHgr;·cm and a lattice constant within approximately ±20% of that of ZnO is disposed on the electrode. An interdigital electrode is disposed on the piezoelectric film.
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