- 专利标题: Differential pressure sensor
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申请号: US10172132申请日: 2002-06-14
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公开(公告)号: US06536288B2公开(公告)日: 2003-03-25
- 发明人: Wolfgang Scholz , Albrecht Vogel , Peter Krippner , Dieter Binz
- 申请人: Wolfgang Scholz , Albrecht Vogel , Peter Krippner , Dieter Binz
- 优先权: DE10130372 20010623
- 主分类号: G01L912
- IPC分类号: G01L912
摘要:
There is described a differential pressure sensor made using glass-silicon technology with a diaphragm plate arranged between two carrier plates. To achieve a high resolution at the beginning of the measuring range in conjunction with high overload resistance, the measuring diaphragm plate of the sensor has for a prescribed measuring range within the same measuring chambers a plurality of mutually independent deflectable regions as measuring diaphragms. Each such region acts as a part-sensor with a part-measuring range. The part-measuring ranges of the part-sensors overlap and in total are equal to the prescribed measuring range of the differential pressure sensor. The displacement of the measuring diaphragm of each part-sensor is mechanically limited outside its part-measuring range by the carrier plates.
公开/授权文献
- US20020194920A1 Differential pressure sensor 公开/授权日:2002-12-26
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