公开(公告)号：US06715358B2

公开(公告)日：2004-04-06

申请号：US10108926

申请日：2002-03-29

申请人： Kamlesh Kumar Jain ,  Vinay Kumar ,  Subhash Chand Kashyap

发明人： Kamlesh Kumar Jain ,  Vinay Kumar ,  Subhash Chand Kashyap

IPC分类号： G01L912

CPC分类号： G01L9/0075

摘要： The present invention discloses a relaxor material lead iron tungstate which has been synthesized in doped and undoped conditions by single and two step heat treatment. The relaxor material is seen to exhibit almost negligible hysteresis and a transducer made thereby shows pressure measurement capability over a wide range from 0.5 MPa to 415 MPa with accuracy of ±0.05%.

摘要翻译： 本发明公开了一种通过单次和两步热处理在掺杂和未掺杂条件下合成的弛豫材料钨酸铅铁。 看到弛豫材料表现出几乎可忽略的滞后现象，由此制成的换能器在0.5MPa至415MPa的宽范围内显示出±0.05％的压力测量能力。

公开(公告)号：US06715357B2

公开(公告)日：2004-04-06

申请号：US10341298

申请日：2003-01-13

申请人： Hironari Ishiguro ,  Yasushi Yamabayashi ,  Dale R. Sogge

发明人： Hironari Ishiguro ,  Yasushi Yamabayashi ,  Dale R. Sogge

IPC分类号： G01L912

CPC分类号： G01L19/0084 ,  G01L19/069 ,  G01L19/143 ,  G01L19/148

摘要： A port fitting is formed with a closed, pedestal end forming a diaphragm on which a strain gauge sensor is mounted. A support member is received on the pedestal end and is formed with a flat end wall having an aperture aligned with the sensor. A portion of a flexible circuit assembly is bonded to the flat end wall with a connector disposed over the support member. A tubular outer housing is fitted over the several components and its bottom portion is welded to the port fitting while its top portion places a selected load on an O-ring received about the connector as well as internal components of the transducer. In one embodiment, a loading washer (72a) is disposed over the O-ring on a first portion (70a) of a two portion connector (70) and retained by a second connector portion (70b). Protrusions (76a1) formed on the tubular housing (76) pass through cut-outs in the second connector portion to place a load on the loading washer. To facilitate assembly, the connector is attachable to the support member in one embodiment by legs of an EMC shield (74), with the shield coupled to the connector by wedging tabs (74c6) and in another embodiment by direct engagement of legs of the connector. In one embodiment a shroud (92) is removably received on the connector to protect elongated terminals extending therefrom. One embodiment is provided with an enhanced environmental seal including a resilient grommet (112) retained by a snap cap (114).

公开(公告)号：US06672171B2

公开(公告)日：2004-01-06

申请号：US09907541

申请日：2001-07-16

申请人： Youfan Gu ,  Garry Holcomb ,  Ole Wenzel

发明人： Youfan Gu ,  Garry Holcomb ,  Ole Wenzel

IPC分类号： G01L912

CPC分类号： H01J37/32458 ,  G01L9/0055 ,  G01L19/003 ,  G01L21/12 ,  H01J37/32743 ,  H01J2237/184

摘要： Transducer apparatus and method combining both an absolute pressure sensor for sensing absolute pressure in the load lock chamber and a differential pressure sensor for sensing a pressure difference between ambient atmospheric pressure and pressure in a load lock chamber and provides control signals for opening an interior door from the load lock chamber into a vacuum processing chamber and for opening an exterior door between ambient atmosphere and the load lock chamber. The transducer can also produce signals to control transition from slow to fast vacuum pump-down of load lock chamber pressure at a predetermined pressure set point.

摘要翻译： 传感器装置和方法组合用于感测负载锁定室中的绝对压力的绝对压力传感器和用于感测负载锁定室中的环境大气压力和压力之间的压力差的差压传感器，并且提供用于打开内部门的控制信号 负载锁定室进入真空处理室并且用于打开环境大气和负载锁定室之间的外部门。 传感器还可以产生信号，以控制在预定压力设定点的负载锁定室压力从慢速到快速真空泵的转换。

公开(公告)号：US06647794B1

公开(公告)日：2003-11-18

申请号：US10139892

申请日：2002-05-06

申请人： Daniel S. Nelson ,  David J. Hillman ,  John McIntire

发明人： Daniel S. Nelson ,  David J. Hillman ,  John McIntire

IPC分类号： G01L912

CPC分类号： G01L9/0073 ,  G01L9/125 ,  G01L19/02 ,  G01L19/04

摘要： A barometric pressure sensor including a base layer, a sensor layer and a reference layer. The base layer has a passageway between a pressure inlet and a mounting face. The sensor layer is bonded by an insulating bond to the mounting face and includes a conductive diaphragm. The reference layer is mounted on the sensor layer to form a reference vacuum cavity. The reference layer includes a conducting surface facing the conductive diaphragm across the reference vacuum cavity to form a pressure sensing capacitor.

摘要翻译： 包括基层，传感器层和参考层的气压传感器。 基层在压力入口和安装面之间具有通道。 传感器层通过绝缘结合键合到安装面，并且包括导电隔膜。 参考层安装在传感器层上以形成参考真空腔。 参考层包括面对参考真空腔的导电隔膜的导电表面以形成压力感测电容器。

公开(公告)号：US06640642B1

公开(公告)日：2003-11-04

申请号：US09653808

申请日：2000-09-01

申请人： Yasuo Onose ,  Atsuo Watanabe ,  Seiji Kuryu ,  Shinya Satou ,  Junichi Horie ,  Satoshi Shimada

发明人： Yasuo Onose ,  Atsuo Watanabe ,  Seiji Kuryu ,  Shinya Satou ,  Junichi Horie ,  Satoshi Shimada

IPC分类号： G01L912

CPC分类号： G01L9/0042 ,  G01L1/146 ,  G01L9/0073

摘要： A pressure sensor of electric capacitance type which includes a plurality of pressure sensor units connected in parallel with one another and each formed on a substrate by an electrode, a cavity region and a diaphragm having an electrically conductive film which is disposed in opposition to the electrode with the cavity region intervening between the electrode and the diaphragm, wherein diaphragm fixing portions are disposed internally of the cavity region so that a single sheet of the diaphragm is partitionarily and regionally allotted to regions of the plural pressure sensor units, respectively. With this structure of the capacitance-type pressure sensor, ineffective region for capacitance detection is minimized and hence the parasitic capacitance can be reduced with the detection accuracy of the sensor being improved.

摘要翻译： 一种电容式压力传感器，其包括彼此并联连接的多个压力传感器单元，每个压力传感器单元通过电极形成在基板上，空腔区域和具有导电膜的隔膜，所述导电膜设置成与电极相对设置 其中腔区插入在电极和隔膜之间，其中隔膜固定部分设置在空腔区域的内部，使得隔膜的单片分别地分区地分配到多个压力传感器单元的区域。 利用电容型压力传感器的这种结构，电容检测的无效区域被最小化，因此可以随着传感器的检测精度提高而降低寄生电容。

公开(公告)号：US06640641B1

公开(公告)日：2003-11-04

申请号：US09623848

申请日：2000-09-08

申请人： Harald Benestad

发明人： Harald Benestad

IPC分类号： G01L912

CPC分类号： G01L9/0072

摘要： A device for capacitive measurement of a medium which at high pressure and optionally also at high temperature is bounded by a wall of a pressure housing or pressure resistance flow guide. The wall includes a cut out or through hole or a through going slot. In the hole or slot there is located a sensor and the sensor is electrically insulated from the material of the wall by the medium. The sensor is secured to the wall by means of a glass-ceramic material which extends from the pressure side of the wall and wholly or partly through the hole or slot. The sensor, at the outer side of the wall is connected to a capacitance-signal processing unit.

摘要翻译： 一种用于在高压和任选地也在高温下的介质的电容测量的装置由压力壳体或压力阻力流动引导件的壁限定。 墙壁包括切口或通孔或贯穿槽。 在孔或槽中有一个传感器，传感器通过介质与墙壁的材料电绝缘。 传感器通过玻璃陶瓷材料固定在壁上，该玻璃陶瓷材料从壁的压力侧延伸并且完全或部分地穿过孔或槽。 在墙外侧的传感器连接到电容信号处理单元。

公开(公告)号：US06606911B2

公开(公告)日：2003-08-19

申请号：US10006783

申请日：2001-12-05

申请人： Morito Akiyama ,  Masahiro Kinoshita ,  Hideyuki Bingo ,  Makoto Nakamura

发明人： Morito Akiyama ,  Masahiro Kinoshita ,  Hideyuki Bingo ,  Makoto Nakamura

IPC分类号： G01L912

CPC分类号： G01L9/0072

摘要： A pressure sensor is formed by sandwiching a pressure-sensitive dielectric membrane between and in contact with a pair of electrodes. As pressure is applied, the dielectric constant of the pressure-sensitive membrane changes while the distance of separation between the pair of electrodes remains constant. This change in the dielectric constant is detected by a circuit as a change in the electrostatic capacitance between the electrodes to measure the applied pressure. Since the pressure-sensitive dielectric membrane is not required to undergo any elastic deformation for measuring the pressure, the pressure sensor can be made extremely thin.

公开(公告)号：US06604425B1

公开(公告)日：2003-08-12

申请号：US09591113

申请日：2000-06-09

申请人： Tsung-Yuan Hsu ,  Robert Y. Loo ,  Juan F. Lam

发明人： Tsung-Yuan Hsu ,  Robert Y. Loo ,  Juan F. Lam

IPC分类号： G01L912

CPC分类号： G01L1/148 ,  G01L1/086

摘要： A method and apparatus for comparing a force to a signal, or comparing two signals, through mechanical movement of capacitive plates in a transducer. The transducer plates are separated by d, which in one embodiment is preferably a linear function of a pressure or force F. In that embodiment, application of a signal i(t+&tgr;) to the plates will cause a voltage representing a correlation between F and i to appear between the plates. In another embodiment, instead of an external mechanical force or pressure, an electrical signal V related to a signal S may drive the transducer plates to achieve a voltage indicating a correlation between S and the signal input i(t+&tgr;). Transducers to practice the invention may be microelectromechanical devices fabricated using integrated circuit techniques to permit small size and low cost.

摘要翻译： 一种用于通过传感器中的电容板的机械移动来比较力与信号或比较两个信号的方法和装置。 传感器板被d分开，在一个实施例中，传感器板优选地是压力或力F的线性函数。在该实施例中，将信号i（t +τ）施加到板将导致表示F 我出现在盘子之间。 在另一个实施例中，代替外部机械力或压力，与信号S相关的电信号V可以驱动换能器板以实现指示S与信号输入i（t +τ）之间的相关性的电压。 用于实践本发明的传感器可以是使用集成电路技术制造的微机电装置，以允许小尺寸和低成本。

公开(公告)号：US06591687B1

公开(公告)日：2003-07-15

申请号：US09219090

申请日：1998-12-22

申请人： Per Bjoerkman ,  Ray Olsson

发明人： Per Bjoerkman ,  Ray Olsson

IPC分类号： G01L912

CPC分类号： G01L9/0075 ,  Y10T29/43 ,  Y10T29/435 ,  Y10T29/49007 ,  Y10T29/49155 ,  Y10T29/49174 ,  Y10T29/49224

摘要： A capacitive vacuum measuring cell includes first and second ceramic housing bodies (1, 4) joined by an edge seal (3). A thin ceramic membrane (2) is supported between first and second housing bodies (1, 4) by the edge seal (3) at a small distance from the first housing body (1) creating a reference vacuum chamber (25) therebetween. An electrically conductive material (7) coats opposing surfaces of the first housing body (1) and the membrane (2) to form a capacitor. A measurement vacuum chamber (26) is provided between the membrane (2) and the second housing body (4). A port (5) communicates with the second housing body (4) to connect the measurement vacuum chamber (26) of the measuring cell to the medium to be measured. The membrane (2) is made from an Al2O3 slurry that is sintered in a first heating step, cooled, and then reheated to smooth the membrane.

摘要翻译： 电容式真空测量单元包括通过边缘密封件（3）连接的第一和第二陶瓷壳体（1,4）。 薄壁陶瓷膜（2）通过边缘密封（3）在与第一壳体（1）相距很小的距离处被支撑在第一和第二壳体（1,4）之间，从而在它们之间形成参考真空室（25）。 导电材料（7）涂覆第一壳体（1）和膜（2）的相对表面以形成电容器。 在膜（2）和第二壳体（4）之间设置测量真空室（26）。 端口（5）与第二壳体（4）连通，将测量室的测量真空室（26）连接到待测介质。 膜（2）由在第一加热步骤中烧结的Al 2 O 3浆料制成，冷却，然后再加热以使膜平滑。

公开(公告)号：US06431005B1

公开(公告)日：2002-08-13

申请号：US09060607

申请日：1998-04-15

申请人： Marie-Thérèse Delaye

发明人： Marie-Thérèse Delaye

IPC分类号： G01L912

CPC分类号： G06K9/0002 ,  G01L9/0042 ,  G01L9/0073

摘要： A pressure sensor cell has a substrate including at least a first electrode and a deformable membrane. The membrane is fixed by its peripheral edge to the substrate and is spaced from the substrate to define a closed chamber around at least a part of the first electrode. A second electrode is provided formed on a wall of the membrane. The second electrode faces the first electrode and is kept separate from the first electrode if no pressure is exerted on the membrane. Finally, an electronic circuit is placed in the substrate under the first electrode.

摘要翻译： 压力传感器单元具有至少包括第一电极和可变形膜的基板。 膜通过其外围边缘固定到基底并且与基底间隔开以限定围绕第一电极的至少一部分的封闭腔室。 提供形成在膜的壁上的第二电极。 如果没有压力施加在膜上，则第二电极面对第一电极并与第一电极分离。 最后，在第一电极下方的基板中放置电子电路。