Diamond coatings on reactor wall and method of manufacturing thereof

Invention Grant

US06537429B2 Diamond coatings on reactor wall and method of manufacturing thereof 失效

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Patent Title: Diamond coatings on reactor wall and method of manufacturing thereof
Application No.: US09749925

Application Date: 2000-12-29
Publication No.: US06537429B2

Publication Date: 2003-03-25
Inventor: Robert J. O'Donnell , John E. Daugherty , Christopher C. Chang
Applicant: Robert J. O'Donnell , John E. Daugherty , Christopher C. Chang
Main IPC: C23C1400
IPC: C23C1400

Diamond coatings on reactor wall and method of manufacturing thereof

Abstract:

A corrosion resistant component of semiconductor processing equipment such as a plasma chamber includes a diamond containing surface and process for manufacture thereof.

Public/Granted literature

US20020086501A1 Diamond coatings on reactor wall and method of manufacturing thereof Public/Granted day:2002-07-04

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