发明授权
- 专利标题: Discharge-pumped excimer laser device
- 专利标题(中): 放电泵浦准分子激光装置
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申请号: US09856138申请日: 2001-05-29
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公开(公告)号: US06539043B1公开(公告)日: 2003-03-25
- 发明人: Hiroyuki Shinozaki , Shinichi Sekiguchi , Toshimitsu Barada , Toshiharu Nakazawa
- 申请人: Hiroyuki Shinozaki , Shinichi Sekiguchi , Toshimitsu Barada , Toshiharu Nakazawa
- 优先权: JP10-340577 19981130
- 主分类号: H01S322
- IPC分类号: H01S322
摘要:
The present invention provides a discharge-pumped excimer laser device which includes a laser chamber filled with a laser gas that is deteriorated to a small extent, magnetic bearings and a motor that are resistant to the entry of dust particles, and parts that are held in contact with the laser gas and suffer little damage, and has a long service life. The discharge-pumped excimer laser device according to the present invention has a laser chamber (1) filled with a laserigas and housing at least a pair of main discharge electrodes (2, 2) for producing an electric discharge to be able to oscillate a laser beam, housings (6, 7) joined to opposite sides of the laser chamber (1), a cross flow fan (3) having opposite ends rotatably supported by magnetic bearings (8, 9, 10, 11) accommodated in the housings (6, 7), for producing a high-speed laser gas flow between the main discharge electrodes (2, 2), a motor (12) accommodated in the housing (7) for rotating the cross flow fan (3), laser gas flow passages (61, 62) extending through gaps between rotor side and stator side of the magnetic bearings (8, 9, 10, 11) and the motor (12) over an axial entire length of the housings (6, 7), and communicating with an interior of the laser chamber (1), a laser gas introduction passage (60) extending from the interior of the laser chamber (1) and communicating with the laser gas flow passages (61, 62), and filters (20, 20) disposed in the laser gas introduction passage (60).