发明授权
- 专利标题: Two-axis yaw rate sensor
- 专利标题(中): 双轴横摆率传感器
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申请号: US09581360申请日: 2000-06-09
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公开(公告)号: US06539804B1公开(公告)日: 2003-04-01
- 发明人: Hitoshi Iwata
- 申请人: Hitoshi Iwata
- 优先权: JP10-174787 19980622
- 主分类号: G01P904
- IPC分类号: G01P904
摘要:
A two-axis yaw rate sensor (1) includes a vibration ring (15) and a ring support plate for supporting the vibration ring (15). The vibration ring (15) includes first to fourth vibrating drive surfaces (16a-16d) arranged in turn in a circumferential direction and narrow portions (17) located between the adjacent drive surfaces (16a-16d). The first and the third drive surfaces (16a, 16c) are opposed to one another on the axis Y passing through the center of the vibration ring (15). The second and the fourth drive surfaces (16b, 16d) are opposed to one another on the axis X passing through the center of the vibration ring (15). The axis Y is substantially perpendicular to the axis X. A PZT film (15) is formed on the drive surfaces (16a-16d) and vibrates the drive surfaces (16a-16d) in a radial direction of the vibrating ring (15). A weight (21) is coupled to a coupling portion (22) of each drive surface (16a-16d) and vibrates in a direction substantially perpendicular to the vibrating direction of the vibrating surfaces (16a-16d). Detection electrode films (24a-24d) are formed on the coupling portions (22) and detect the deformation of the corresponding coupling portions (22).
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