公开(公告)号：US06817244B2

公开(公告)日：2004-11-16

申请号：US10337008

申请日：2003-01-06

申请人： William P. Platt

发明人： William P. Platt

IPC分类号： G01P904

CPC分类号： G01C19/56

摘要： A method for reducing effects of common mode oscillations between two respective proof masses in micro-electromechanical systems (MEMS) devices is described. The MEMS devices also include a motor pickoff comb, a sense plate, and a motor drive comb for each proof mass. The method includes amplifying signals received from respective motor pickoff combs, inverting the amplified signal from one of the motor pickoff combs, and generating a difference signal between the inverted, amplified signal from one pickoff comb, and the non-inverted, amplified signal from the other pickoff comb. The method also includes inputting the difference signal into a control loop and generating motor drive signals for respective motor drive combs with the control loop.

摘要翻译： 描述了一种用于减小微机电系统（MEMS）装置中的两个相应的检验质量之间共模振荡的影响的方法。 MEMS器件还包括用于每个检验质量块的电机检测梳，感测板和电机驱动梳。 该方法包括放大从各个电动机拾波梳接收的信号，将来自电动机拾波梳之一的放大信号进行反相，并产生来自一个拾波梳的反相放大信号与来自 其他拾音梳。 该方法还包括将差分信号输入到控制回路中，并且通过控制回路产生用于各个电机驱动梳的电机驱动信号。

公开(公告)号：US06776041B1

公开(公告)日：2004-08-17

申请号：US10089018

申请日：2002-08-15

申请人： Joerg Hauer ,  Michael Fehrenbach ,  Karsten Funk

发明人： Joerg Hauer ,  Michael Fehrenbach ,  Karsten Funk

IPC分类号： G01P904

CPC分类号： G01C19/5712

摘要： A micromechanical yaw rate sensor having: a substrate having an anchoring device provided on the substrate; and an annular flywheel that is connected, via a flexural spring system, with the anchoring device in such a way that the area of connection with the anchoring device is located essentially in the center of the ring, so that the annular flywheel is able to be displaced, elastically from its rest position, about an axis of rotation situated perpendicular to the substrate surface, and about at least one axis of rotation situated parallel to the substrate surface. The anchoring device has two bases that are situated opposite one another and are connected fixedly with the substrate, connected with one another via a bridge. A V-shaped flexural spring of the flexural spring system is attached to each of the opposite sides of the bridge in such a way that the apex is situated on the bridge and the limbs are spread towards the flywheel with an opening angle.

摘要翻译： 一种微机械偏航率传感器，具有：具有设置在所述基板上的锚定装置的基板; 以及环形飞轮，其经由弯曲弹簧系统与锚固装置连接，使得与锚固装置的连接区域基本上位于环的中心，使得环形飞轮能够 围绕其垂直于衬底表面定位的旋转轴线以及围绕平行于衬底表面定位的至少一个旋转轴旋转地从其静止位置移位。 锚固装置具有两个彼此相对定位并且与基板固定连接的基座，通过桥连接。 弯曲弹簧系统的V形弯曲弹簧以这样的方式附接到桥的每个相对侧，使得顶点位于桥上，并且四肢以飞轮的角度朝飞轮扩展。

公开(公告)号：US06674294B2

公开(公告)日：2004-01-06

申请号：US10232278

申请日：2002-08-30

申请人： Paul Ward

发明人： Paul Ward

IPC分类号： G01P904

CPC分类号： G01C19/5719

摘要： The present invention relates to a system for nulling drive feedthrough error in a sensor having first and second drive electrodes which impart vibratory motion to first and second proof masses in response to first and second opposite phase drive signals, and having first and second capacitances defined between the drive electrodes and their associated proof masses. A mismatch between the first and the second capacitance is measured. Drive feedthrough caused by the measured capacitance mismatch is nulled by adjusting the relative amplitudes of the first and second opposite phase drive signals, whereby the ratio of the amplitudes is proportional to the ratio of the first and second capacitances. A servo loop may adaptively effect the ratio of amplitudes.

摘要翻译： 本发明涉及一种用于在具有第一和第二驱动电极的传感器中使驱动馈通误差为零的系统，其响应于第一和第二相反相位驱动信号向第一和第二检测质量施加振动运动，并且具有第一和第二电容之间的第一和第二电容， 驱动电极及其相关的校准质量。 测量第一和第二电容之间的不匹配。 通过调整第一和第二反相驱动信号的相对幅度，由测量的电容失配引起的驱动馈通无效，由此幅度比与第一和第二电容的比例成比例。 伺服环路可以自适应地影响振幅比。

公开(公告)号：US06539804B1

公开(公告)日：2003-04-01

申请号：US09581360

申请日：2000-06-09

申请人： Hitoshi Iwata

发明人： Hitoshi Iwata

IPC分类号： G01P904

CPC分类号： G01C19/5677

摘要： A two-axis yaw rate sensor (1) includes a vibration ring (15) and a ring support plate for supporting the vibration ring (15). The vibration ring (15) includes first to fourth vibrating drive surfaces (16a-16d) arranged in turn in a circumferential direction and narrow portions (17) located between the adjacent drive surfaces (16a-16d). The first and the third drive surfaces (16a, 16c) are opposed to one another on the axis Y passing through the center of the vibration ring (15). The second and the fourth drive surfaces (16b, 16d) are opposed to one another on the axis X passing through the center of the vibration ring (15). The axis Y is substantially perpendicular to the axis X. A PZT film (15) is formed on the drive surfaces (16a-16d) and vibrates the drive surfaces (16a-16d) in a radial direction of the vibrating ring (15). A weight (21) is coupled to a coupling portion (22) of each drive surface (16a-16d) and vibrates in a direction substantially perpendicular to the vibrating direction of the vibrating surfaces (16a-16d). Detection electrode films (24a-24d) are formed on the coupling portions (22) and detect the deformation of the corresponding coupling portions (22).

摘要翻译： 双轴横摆率传感器（1）包括振动环（15）和用于支撑振动环（15）的环形支撑板。 振动环（15）包括沿圆周方向依次布置的第一至第四振动驱动表面（16a-16d）和位于相邻驱动表面（16a-16d）之间的窄部分（17）。 第一和第三驱动表面（16a，16c）在通过振动环（15）的中心的轴线Y上彼此相对。 第二和第四驱动表面（16b，16d）在通过振动环（15）的中心的轴线X上彼此相对。 轴Y基本上垂直于轴线X.PZT膜（15）形成在驱动表面（16a-16d）上，并使振动环（15）的径向上的驱动表面（16a-16d）振动。 重物（21）联接到每个驱动表面（16a-16d）的联接部分（22）并且在基本上垂直于振动表面（16a-16d）的振动方向的方向上振动。 检测电极膜（24a-24d）形成在耦合部分（22）上并检测相应联接部分（22）的变形。

公开(公告)号：US06539801B1

公开(公告)日：2003-04-01

申请号：US09617599

申请日：2000-06-29

申请人： Roman C. Gutierrez ,  Tony K. Tang

发明人： Roman C. Gutierrez ,  Tony K. Tang

IPC分类号： G01P904

CPC分类号： G01C19/5719 ,  G01P2015/084

摘要： A microgyroscope having a suspended vertical post uses the Coriolis force to detect the rotation rate. The microgyroscope consists of a single vertical post which senses the rotation rate. The vertical post is supported by multiple silicon suspensions. The vertical post is driven electrostatically to oscillatory in-plane (x and y directions) by vertical capacitors. The Coriolis force induced motions of the vertical post is detected capacitively by the vertical capacitors.

摘要翻译： 具有悬挂垂直柱的微型陀螺仪使用科里奥利力来检测旋转速率。 微型陀螺仪由一个垂直的柱子组成，可以感测到旋转速度。 垂直柱由多个硅悬浮液支撑。 垂直柱通过垂直电容器静电驱动到平面内（x和y方向）振荡。 通过垂直电容器电容地检测科里奥利力引起的垂直柱的运动。

公开(公告)号：US06457358B1

公开(公告)日：2002-10-01

申请号：US09659624

申请日：2000-09-11

申请人： Jiashi Yang

发明人： Jiashi Yang

IPC分类号： G01P904

CPC分类号： G01C19/5642 ,  G01C19/5607

摘要： Disclosed is a piezoelectric gyroscope which presents as a generally elongated tubular shape having inner and outer radially polarized annular region defining surfaces, with an inner electrode on the inner surface, and four outer electrodes present on the outer surface. The four electrodes present on the outer surface are oriented such that each is in a separate quadrant, (as the piezoelectric gyroscope generally longitudinally elongated essentially tubular structure is viewed in cross-section), and ideally at substantially ninety degree intervals on the outer surface. In use the piezoelectric gyroscope system is caused to rotate about an essentially centrally located longitudinally oriented axis while a flex inducing driving voltage is applied across two of the four electrodes, (driving) electrodes, which are oriented at substantially 180 degrees with respect to one another, while an output voltage is sensed across the other two (sensing), electrodes. Also disclosed are a tuning-fork shaped variations.

摘要翻译： 公开了一种压电陀螺仪，其呈现为具有限定表面的内部和外部径向偏振的环形区域的大体上细长的管状形状，内表面上具有内部电极，以及存在于外部表面上的四个外部电极。 存在于外表面上的四个电极被定向成使得每个位于单独的象限中（因为压电陀螺仪在大致纵向上伸长的基本上是管状结构的横截面），并且理想地在外表面上以基本上九十度的间隔。 在使用中，使压电陀螺仪系统围绕基本上位于中心的纵向定向的轴线旋转，同时将柔性感应驱动电压施加在四个电极中的两个（驱动）电极上，所述四个电极相对于彼此大致180度取向 ，而在另外两个（感测）电极上检测输出电压。 还公开了音叉形变化。

公开(公告)号：US06445195B1

公开(公告)日：2002-09-03

申请号：US09631249

申请日：2000-08-02

申请人： Paul Ward

发明人： Paul Ward

IPC分类号： G01P904

CPC分类号： G01C19/5719

摘要： The present invention relates to a system for nulling drive feedthrough error in a sensor having first and second drive electrodes which impart vibratory motion to first and second proof masses in response to first and second opposite phase drive signals, and having first and second capacitances defined between the drive electrodes and their associated proof masses. A mismatch between the first and the second capacitance is measured. Drive feedthrough caused by the measured capacitance mismatch is nulled by adjusting the relative amplitudes of the first and second opposite phase drive signals, whereby the ratio of the amplitudes is proportional to the ratio of the first and second capacitances. A servo loop may adaptively effect the ratio of amplitudes.

摘要翻译： 本发明涉及一种用于在具有第一和第二驱动电极的传感器中使驱动馈通误差为零的系统，其响应于第一和第二相反相位驱动信号向第一和第二检测质量施加振动运动，并且具有第一和第二电容之间的第一和第二电容， 驱动电极及其相关的校准质量。 测量第一和第二电容之间的不匹配。 通过调整第一和第二反相驱动信号的相对幅度，由测量的电容失配引起的驱动馈通无效，由此幅度比与第一和第二电容的比例成比例。 伺服环路可以自适应地影响振幅比。

公开(公告)号：US06392220B1

公开(公告)日：2002-05-21

申请号：US09388772

申请日：1999-09-02

申请人： Timothy G. Slater ,  Armand P. Neukermans

发明人： Timothy G. Slater ,  Armand P. Neukermans

IPC分类号： G01P904

CPC分类号： H04Q11/0005 ,  B81B3/0051 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/058 ,  G02B6/32 ,  G02B6/327 ,  G02B6/3518 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/085 ,  H04Q2011/003 ,  H04Q2011/0039 ,  H04Q2011/0043

摘要： A monolithically fabricated micromachined structure (52) couples a reference frame (56) to a dynamic plate (58) or second frame for rotation of the plate (58) or second frame with respect to the reference frame (56). Performance of torsional oscillators or scanners (52) benefits greatly by coupling the frame (56) to the plate (58) or second frame with torsional flexure hinges (56) rather than torsion bars (54). Appendages (122), tethers (142) or an improved drive circuit enhance electrostatic drive stability of torsional oscillators (52). Wide and thin torsional flexure hinges (96) and isotopically pure silicon enhance thermal conductivity between the plate (58) and the frame (56). Dampening material bridging slots (232) adjacent to torsional flexure hinges (96) drastically reduce the dynamic member's Q. A widened section (252) of narrow torsional flexure hinges (96) permit inclusion of a torsion sensor (108). A dynamic member (58) that includes an actuator portion (302) performs light beam switching. Reflective coatings (76), wire grid polarizers (362), photo-detectors (372) and Fresnel lenses (376) enhance optical performance of the torsional scanners (58).

摘要翻译： 单片制造的微加工结构（52）将参考框架（56）耦合到动态板（58）或第二框架，用于相对于参考框架（56）转动板（58）或第二框架。 扭转振荡器或扫描仪（52）的性能通过将框架（56）与扭转挠性铰链（56）而不是扭杆（54）联接到板（58）或第二框架而受益匪浅。 附件（122），系绳（142）或改进的驱动电路增强了扭转振荡器（52）的静电驱动稳定性。 宽和薄的扭转弯曲铰链（96）和同位素纯硅增强了板（58）和框架（56）之间的热导率。 与扭转弯曲铰链（96）相邻的阻尼材料桥接槽（232）大大减小了动态构件的Q.窄扭转挠曲铰链（96）的加宽部分（252）允许包括扭转传感器（108）。 包括致动器部分（302）的动态构件（58）执行光束切换。 反射涂层（76），线栅偏振器（362），光电检测器（372）和菲涅尔透镜（376）增强了扭转扫描器（58）的光学性能。

公开(公告)号：US06367326B1

公开(公告)日：2002-04-09

申请号：US09547799

申请日：2000-04-12

申请人： Kazuhiro Okada

发明人： Kazuhiro Okada

IPC分类号： G01P904

CPC分类号： G01C19/5712 ,  G01P3/16

摘要： A pivotal shaft (130) is provided along the Z-axis on a semiconductor substrate (100), whose upper surface extends along the XY-plane, to fit a rotor (200) consisting of dielectric material. The rotor is supported by the pivotal shaft so that it can be inclined and can be rotated. The peripheral portion of the rotor constitutes weight bodies (211, 212), and stators (111, 115) consisting of conductive material are disposed at the periphery thereof. When a.c. voltages of predetermined period are delivered to the stators, the rotor is rotated while floating in accordance with the principle of the induction motor. When angular velocity &ohgr;x about the X-axis is applied to the substrate 100, Corioli's force Fcz in the Z-axis positive direction is applied to the weight body (211) passing through the X-axis with velocity component in the Y-axis positive direction so that it becomes away from-the substrate. Corioli's force −Fcz in the Z-axis negative direction is applied to the weight body (212) passing through the X-axis with velocity component in the Y-axis negative direction so that it becomes close the substrate. Capacitance elements C1, C2 are formed by fixed electrodes (141AB, 142AB) on the substrate and movement electrodes (231, 232) on the rotor. Difference between electrostatic capacitance values of both the capacitance elements is obtained to detect magnitude of applied Corioli's force. The magnitude of the detected Corioli's force is outputted as a value of angular velocity &ohgr;x about the X-axis. Even under the environment where acceleration is applied, the acceleration component is canceled by obtaining difference.

摘要翻译： 沿着Z轴设置在Z轴上的枢转轴（130），半导体基板（100）的上表面沿XY平面延伸，以配合由电介质材料构成的转子（200）。 转子由枢转轴支撑，使其可以倾斜并且可以旋转。 转子的周边部分构成重物体（211,212），由导电材料构成的定子（111,115）设置在其周边。 当a.c. 预定时间段的电压被传送到定子，转子根据感应电机的原理浮动而旋转。 当将关于X轴的角速度ω加到衬底100上时，沿Z轴正方向的Corioli力Fcz被施加到通过X轴的重量体（211）上，Y轴的速度分量为正 方向使其远离基底。 将通过X轴的重量体（212）沿Y轴负方向施加到Z轴负方向的科里奥利力-Fcz，使其靠近基板。 电容元件C1，C2由基板上的固定电极（141AB，142AB）和转子上的移动电极（231,232）形成。 获得两个电容元件的静电电容值之间的差异来检测施加的科里奥利力的大小。 检测到的科里奥利力的大小作为围绕X轴的角速度ωgax的值输出。 即使在施加加速度的环境下，通过获得差异来抵消加速度分量。

公开(公告)号：US06357296B1

公开(公告)日：2002-03-19

申请号：US09434983

申请日：1999-11-05

申请人： John C. Baker ,  Daniel T. Zaida ,  Gregory M. Johnson

发明人： John C. Baker ,  Daniel T. Zaida ,  Gregory M. Johnson

IPC分类号： G01P904

CPC分类号： G01C19/56

摘要： A vibratory sensor with a resonator for measuring angular rotation, such as for example a hemispherical resonator gyroscope (HRG) operating in force rebalance mode, includes circuitry to generate a virtual node and antinode in the resonator standing wave. Shifting a pair of pickoff electrodes from a position directly over an actual node in the HRG standing wave to an offset position where the primary and secondary harmonic contributions at the first pickoff electrode are equal to the primary and secondary harmonic contributions at the second pickoff electrode permits the elimination of secondary harmonics contribution. A virtual node is created by offsetting a pair of pickoff electrodes 22.5 degrees from the actual antinode such that each pickoff electrode includes an equal contribution of the secondary harmonic signal present in the standing wave. Differencing the two signals eliminates both the primary signal contribution as well as the secondary harmonic signal contribution, thereby reducing the signal below the actual node signal. The virtual node can then be amplified to a greater extent without the filtering and shifting that is ordinarily required of the signal processing at the actual node. While the virtual antinode includes contributions of the secondary harmonic signal at both pickoff electrodes, the peak amplitude of the secondary harmonic is typically only one percent of the primary vibration pattern and does not adversely affect the processing of the virtual antinode. Using a circuit which adds and differences the two inputs requires only two additional buffers and results in a vibratory sensor with significantly better accuracy.

摘要翻译： 具有用于测量角度旋转的谐振器的振动传感器，例如在力重新平衡模式下操作的半球谐振器陀螺仪（HRG），包括在谐振器驻波中产生虚拟节点和波腹的电路。 将一对拾取电极从直接在HRG驻波中的实际节点上的位置移动到偏移位置，其中第一检测电极处的初级和次级谐波贡献等于第二检测电极处的一次和二次谐波贡献允许 消除二次谐波贡献。 通过将距离实际波腹22.5度的一对拾取电极偏移，使得每个拾取电极包括存在于驻波中的二次谐波信号的相等贡献来创建虚拟节点。 差分两个信号消除了主要信号贡献以及二次谐波信号贡献，从而减少了低于实际节点信号的信号。 然后可以在更大程度上放大虚拟节点，而不需要在实际节点处进行信号处理通常需要的滤波和移位。 虽然虚拟波腹包括在两个拾取电极处的二次谐波信号的贡献，但是二次谐波的峰值振幅通常仅为主振动模式的一个百分点，并且不会对虚拟波腹的处理产生不利影响。 使用增加和差异两个输入的电路只需要两个额外的缓冲器，并产生具有更好精度的振动传感器。