发明授权
- 专利标题: Method and system for manufacture of field emission display
- 专利标题(中): 场致发射显示的制造方法和系统
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申请号: US10010707申请日: 2001-11-09
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公开(公告)号: US06540898B2公开(公告)日: 2003-04-01
- 发明人: Robert T. Rasmussen
- 申请人: Robert T. Rasmussen
- 主分类号: C25D1300
- IPC分类号: C25D1300
摘要:
High resolution color displays for field emission displays are formed by applying a grille to a screen layer, the grille having a set of holes formed therein exposing areas of the screen layer. A layer of photoresist is applied to the grille and the exposed areas of the screen layer, whereby a plurality of photoresist-covered screen layer areas are defined. One set of the plurality of photoresist-covered screen layer areas is fixed, whereby a fixed set and an unfixed set are defined. The photoresist is removed from the unfixed set and a light emitting substance is deposited on the exposed screen layer area. The fixed set of photoresist is plasma etched.
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