Method for adjusting dimensions of photomask features
    1.
    发明授权
    Method for adjusting dimensions of photomask features 失效
    调整光掩模特征尺寸的方法

    公开(公告)号:US07749663B2

    公开(公告)日:2010-07-06

    申请号:US11516234

    申请日:2006-09-06

    IPC分类号: G03F1/00

    摘要: A method for adjusting one or more dimensions of a photomask subsequent to etching of a defective pattern in the chrome-containing layer thereof is provided. The method includes subjecting the chrome-containing layer of a photomask to a wet etch process utilizing a solution comprising deionized water and ozone. The length of exposure is directly proportional to the degree of adjustment desired. Accordingly, the method of the present invention provides a way in which dimensions of a photomask may be adjusted by a small amount (e.g., a few angstroms) or more severely adjusted, for example, by 20-30 nanometers or more.

    摘要翻译: 提供了在其含铬层中蚀刻缺陷图案之后调整光掩模的一个或多个维度的方法。 该方法包括使用包含去离子水和臭氧的溶液对光掩模的含铬层进行湿式蚀刻工艺。 曝光长度与所需的调整程度成正比。 因此,本发明的方法提供了一种方法,其中光掩模的尺寸可以被调整少量(例如几埃)或更严格地调节,例如20-30纳米或更多。

    Anode screen for a phosphor display and method of making the same

    公开(公告)号:US07052352B2

    公开(公告)日:2006-05-30

    申请号:US10441716

    申请日:2003-05-20

    IPC分类号: H01J9/00

    CPC分类号: H01J29/085 H01J31/127

    摘要: An anode screen for a field-emission-display is formed by layering light-permeable conductive material and phosphor respectively over a transparent substrate. A plurality of holes are formed in the layer of phosphor to expose corresponding regions of the conductive material. In a further embodiment, the anode screen is disposed in spaced and opposing relationship to a cathode emitter plate that comprises a plurality of electron emitters. Pixel regions of the phosphor of the anode screen correspond to regions of the phosphor opposite respective electron emitters of the plurality of electron emitters. Preferably, each pixel region of the phosphor has a number of holes spaced equally about its periphery. In the preferred embodiment, six holes delimit a hexagon shape for their respective pixel region, wherein centers of the holes provide apexes of the hexagon.

    Method and apparatuses for providing uniform electron beams from field emission displays
    3.
    发明授权
    Method and apparatuses for providing uniform electron beams from field emission displays 失效
    用于从场发射显示器提供均匀电子束的方法和装置

    公开(公告)号:US07049753B2

    公开(公告)日:2006-05-23

    申请号:US10219201

    申请日:2002-08-14

    IPC分类号: G09G

    摘要: The invention includes field emitters, field emission displays (FEDs), monitors, computer systems and methods employing the same for providing uniform electron beams from cathodes of FED devices. The apparatuses each include electron beam uniformity circuitry. The electron beam uniformity circuit provides a grid voltage, VGrid, with a DC offset voltage sufficient to induce field emission from a cathode and a periodic signal superimposed on the DC offset voltage for varying the grid voltage at a frequency fast enough to be undetectable by the human eye. The cathodes may be of the micro-tipped or flat variety. The periodic signal may be sinusoidal with peak-to-peak voltage of between about 5 volts and about 50 volts.

    摘要翻译: 本发明包括场发射器,场致发射显示器(FED),监视器,计算机系统以及采用该系统的方法来从FED装置的阴极提供均匀的电子束。 这些装置各自包括电子束均匀性电路。 电子束均匀性电路提供具有足以诱导来自阴极的场发射的DC偏移电压的电网电压V T和栅极电压,以及叠加在DC偏移电压上的周期性信号,用于在 频率足够快,不能被人眼察觉。 阴极可以是微尖或扁平的品种。 周期信号可以是正弦曲线,其中峰 - 峰电压介于约5伏至约50伏之间。

    Method and system for manufacture of field emission display
    5.
    发明授权
    Method and system for manufacture of field emission display 有权
    场致发射显示的制造方法和系统

    公开(公告)号:US06540898B2

    公开(公告)日:2003-04-01

    申请号:US10010707

    申请日:2001-11-09

    IPC分类号: C25D1300

    摘要: High resolution color displays for field emission displays are formed by applying a grille to a screen layer, the grille having a set of holes formed therein exposing areas of the screen layer. A layer of photoresist is applied to the grille and the exposed areas of the screen layer, whereby a plurality of photoresist-covered screen layer areas are defined. One set of the plurality of photoresist-covered screen layer areas is fixed, whereby a fixed set and an unfixed set are defined. The photoresist is removed from the unfixed set and a light emitting substance is deposited on the exposed screen layer area. The fixed set of photoresist is plasma etched.

    摘要翻译: 用于场致发射显示器的高分辨率彩色显示器通过将丝网施加到屏幕层而形成,格栅具有形成在其中的一组孔,用于暴露屏幕层的区域。 将一层光致抗蚀剂施加到格栅和屏幕层的暴露区域,由此限定了多个光致抗蚀剂覆盖的屏幕层区域。 多个光致抗蚀剂覆盖的屏幕层区域中的一组被固定,由此定义固定组和未固定组。 从未固定的组中除去光致抗蚀剂,并且在曝光的屏幕层区域上沉积发光物质。 固定的光致抗蚀剂组被等离子体蚀刻。

    Process for operating a field emission display with a layer of praseodymium-manganese oxide material
    6.
    发明授权
    Process for operating a field emission display with a layer of praseodymium-manganese oxide material 失效
    用镨锰氧化物材料层操作场致发射显示的方法

    公开(公告)号:US06413577B1

    公开(公告)日:2002-07-02

    申请号:US08899844

    申请日:1997-07-24

    IPC分类号: C23C1640

    摘要: A process for operating a field emission display (FED) is disclosed. The FED has a faceplate and a baseplate, and a layer of praseodymium-manganese oxide disposed between the faceplate and baseplate. The layer absorbs photons during operation of the FED, and thus provides for improved performance of the FED because, for example, stray photons do not impact the underlying circuitry of the FED.

    摘要翻译: 公开了一种用于操作场发射显示(FED)的处理。 FED具有面板和底板,并且设置在面板和底板之间的一层镨锰氧化物。 该层在FED的操作期间吸收光子,因此提供了FED的改善的性能,因为例如杂散光子不影响FED的底层电路。

    Field emission display having black matrix material
    8.
    发明授权
    Field emission display having black matrix material 失效
    具有黑色矩阵材料的场发射显示

    公开(公告)号:US06224730B1

    公开(公告)日:2001-05-01

    申请号:US09541352

    申请日:2000-03-31

    IPC分类号: C25D1302

    摘要: A black matrix material for increasing resolution and contrast of field emission displays is disclosed. The black matrix material is preferably deposited by electrophoresis in the interstitial regions between phosphor pixels of the faceplate. By this technique, high resolution and/or small surface area field emission displays may be manufactured. The black matrix material does not brown when subjected to the conditions associated with the manufacture of field emission displays, is chemically inert and remains stable under vacuum conditions and electron bombardment. The black matrix material is selected from boron carbide, silicon carbide, tungsten carbide, vanadium carbide and mixtures thereof.

    摘要翻译: 公开了一种用于增加场发射显示器的分辨率和对比度的黑色矩阵材料。 黑色基体材料优选通过电泳沉积在面板的荧光体像素之间的间隙区域中。 通过该技术,可以制造高分辨率和/或小的表面积场致发射显示器。 当受到与场致发射显示器制造有关的条件时,黑色基体材料不褐色,是化学惰性的并且在真空条件和电子轰击下保持稳定。 黑色基体材料选自碳化硼,碳化硅,碳化钨,碳化钒及其混合物。