发明授权
US06541310B1 Method of fabricating a thin and fine ball-grid array package with embedded heat spreader
有权
制造具有嵌入式散热器的细小球栅阵列封装的方法
- 专利标题: Method of fabricating a thin and fine ball-grid array package with embedded heat spreader
- 专利标题(中): 制造具有嵌入式散热器的细小球栅阵列封装的方法
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申请号: US09624093申请日: 2000-07-24
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公开(公告)号: US06541310B1公开(公告)日: 2003-04-01
- 发明人: Randy H. Y. Lo , Chi-Chuan Wu
- 申请人: Randy H. Y. Lo , Chi-Chuan Wu
- 主分类号: H01L2144
- IPC分类号: H01L2144
摘要:
A method is proposed for fabricating a TFBGA (Thin & Fine Ball-Grid Array) package with embedded heat spreader. Conventionally, since an individual TFBGA package is quite small in size, it would be highly difficult to incorporate an embedded heat spreader therein. As a solution to this problem, the proposed method utilizes a single substrate pre-defined with a plurality of package sites, and further utilizes a heat-spreader frame including an integrally-formed matrix of heat spreaders each corresponding to one of the package sites on the substrate. A batch of semiconductor chips are then mounted on the respective package sites on the substrate. During the encapsulation process, a single continuous encapsulation body is formed to encapsulate the entire heat-spreader frame and all the semi-conductor chips. After ball implantation, a singulation process is performed to cut apart the encapsulation body into individual package units, each serving as the intended TFBGA package. In the foregoing process, since the entirety of the heat-spreader frame is relatively large in size as compared to the size of an individual TFBGA package, it can be easily handled, so that the embedding of a heat spreader in each package unit can be easily carried out.
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