The present invention provides co-doped zinc oxide to flat panel, light emissive display devices and vacuum microelectronic devices to improve their efficiency and lifetime. This material has a low growth temperature and is compatible with metal oxide semiconductor (MOS) processing technology. It is tranparent, chemically stable and has a low work function, which result in many advantages when being used as the cathode for the aforementioned devices. In one embodiment of the emissive display device, an organic light diode (OLED) display has a high work function metal anode, such as platinum (Pt), gold (Au) or nickel (Ni) and a low work function co-doped zinc oxide cathode. Because of the energy level alignment provided by these two materials, the potential energy barriers to injection of electrons from the cathode and holes from the anode into the organic emissive medium are minimized so the display device operates more efficiently.