发明授权
US06545260B1 Light scanning optical device which acquires a high resolution two-dimensional image without employing a charge-coupled device
失效
在不使用电荷耦合器件的情况下获取高分辨率二维图像的光扫描光学器件
- 专利标题： Light scanning optical device which acquires a high resolution two-dimensional image without employing a charge-coupled device
- 专利标题（中）： 在不使用电荷耦合器件的情况下获取高分辨率二维图像的光扫描光学器件
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申请号： US09713954申请日： 2000-11-16
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公开(公告)号： US06545260B1公开(公告)日： 2003-04-08
- 发明人: Masahiro Katashiro , Kazuya Matsumoto , Shuichi Takayama , Katsuya Ono , Takeshi Suga , Hiroyuki Sangu
- 申请人： Masahiro Katashiro , Kazuya Matsumoto , Shuichi Takayama , Katsuya Ono , Takeshi Suga , Hiroyuki Sangu
- 优先权： JP11-330191 19991119; JP11-330193 19991119
- 主分类号： G01B910
- IPC分类号： G01B910
摘要：
A light scanning optical device comprises a light source for entirely illuminating a subject, a converging optical system for converging light returning from a specific minute region of the subject, a light detector for detecting the light converged by the converging optical system, and a scanning mirror for scanning the minute region, the scanning mirror being produced by a semiconductor manufacturing process.
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