公开(公告)号：US06545260B1

公开(公告)日：2003-04-08

申请号：US09713954

申请日：2000-11-16

申请人： Masahiro Katashiro ,  Kazuya Matsumoto ,  Shuichi Takayama ,  Katsuya Ono ,  Takeshi Suga ,  Hiroyuki Sangu

发明人： Masahiro Katashiro ,  Kazuya Matsumoto ,  Shuichi Takayama ,  Katsuya Ono ,  Takeshi Suga ,  Hiroyuki Sangu

IPC分类号： G01B910

CPC分类号： G02B23/2484 ,  A61B1/00096 ,  A61B1/00172 ,  A61B1/042 ,  G01B9/00 ,  G02B23/243

摘要： A light scanning optical device comprises a light source for entirely illuminating a subject, a converging optical system for converging light returning from a specific minute region of the subject, a light detector for detecting the light converged by the converging optical system, and a scanning mirror for scanning the minute region, the scanning mirror being produced by a semiconductor manufacturing process.

摘要翻译： 光扫描光学装置包括用于完全照射被摄体的光源，用于会聚从被检体的特定微小区域返回的光的会聚光学系统，用于检测会聚光学系统会聚的光的光检测器和扫描镜 为了扫描微小区域，通过半导体制造工艺制造扫描镜。

公开(公告)号：US06949996B2

公开(公告)日：2005-09-27

申请号：US10121342

申请日：2002-04-12

申请人： Kazuya Matsumoto ,  Masahiro Katashiro ,  Hiroshi Miyajima ,  Toshihiko Isokawa

发明人： Kazuya Matsumoto ,  Masahiro Katashiro ,  Hiroshi Miyajima ,  Toshihiko Isokawa

IPC分类号： G02B26/08 ,  B81B3/00 ,  B81C1/00 ,  G02B26/10 ,  H02N1/00 ,  H04N1/113 ,  H01H51/22

CPC分类号： G02B26/0841 ,  B81B3/0062 ,  B81B3/0086 ,  B81B2203/0109 ,  B81C2201/0167 ,  G02B26/085 ,  G02B26/101 ,  H02N1/006

摘要： A two-dimensional driving actuator comprises a flat spring structure, and a driver for driving the flat spring structure. The flat spring structure includes a moving plate, a moving inner frame surrounding the moving plate, first torsion bars coupling the moving plate and the moving inner frame so as to allow the moving plate to be vibrated relative to the moving inner frame, a fixed outer frame surrounding the moving inner frame, and second torsion bars coupling the moving inner frame and the fixed outer frame so as to allow the moving inner frame to be vibrated relative to the fixed outer frame. The flat spring structure is manufactured from a single semiconductor substrate. The first and second torsion bars are made of different materials.

摘要翻译： 二维驱动致动器包括平板弹簧结构和用于驱动扁平弹簧结构的驱动器。 平板弹簧结构包括移动板，围绕移动板的移动内框架，联接移动板和移动内框架的第一扭杆，以允许移动板相对于移动内框架振动;固定外壳 围绕移动的内框架的框架，以及联接移动内框架和固定外框架的第二扭杆，以允许移动的内框架相对于固定的外框架振动。 扁平弹簧结构由单个半导体衬底制造。 第一和第二扭杆由不同的材料制成。

公开(公告)号：US07022609B2

公开(公告)日：2006-04-04

申请号：US10646757

申请日：2003-08-25

申请人： Satoshi Yamamoto ,  Takashi Takizawa ,  Tatsuo Suemasu ,  Masahiro Katashiro ,  Hiroshi Miyajima ,  Kazuya Matsumoto ,  Toshihiko Isokawa

发明人： Satoshi Yamamoto ,  Takashi Takizawa ,  Tatsuo Suemasu ,  Masahiro Katashiro ,  Hiroshi Miyajima ,  Kazuya Matsumoto ,  Toshihiko Isokawa

IPC分类号： H01L21/302

CPC分类号： H01L21/76898 ,  H01L23/481 ,  H01L2224/02372 ,  H01L2224/0401 ,  H01L2224/05 ,  H01L2224/05025 ,  H01L2224/0557 ,  H01L2224/06181 ,  H01L2224/131 ,  H01L2924/0002 ,  Y10T29/49155 ,  Y10T29/49156 ,  H01L2924/014 ,  H01L2224/05552

摘要： A manufacturing method of a semiconductor substrate provided with a through hole electrode is proposed. In accordance with the methods, it is possible to effectively form a through hole electrode in a semiconductor substrate in which a device and a wiring pattern have been already fabricated. This manufacturing method includes the steps of forming a first silicon oxide film 12 on a principal surface of the semiconductor substrate 11, forming a small hole 13 through the semiconductor substrate 11 from the opposite the step to reach to the first silicon oxide film 12, covering the inside of the small hole 13 with the second silicon oxide film 14, forming a first thin metal film 15 and a second thin metal film 16 on the first silicon oxide film 12, partially removing the first silicon oxide film 12 corresponding to the end of the small hole 13, and filling the small hole 13 with the conductive material to form a through hole electrode 17.

摘要翻译： 提出了具有通孔电极的半导体衬底的制造方法。 根据该方法，可以在其中已经制造了器件和布线图案的半导体衬底中有效地形成通孔电极。 该制造方法包括以下步骤：在半导体衬底11的主表面上形成第一氧化硅膜12，与步骤相反的步骤，通过半导体衬底11形成小孔13，以到达第一氧化硅膜12，覆盖 小孔13的内部与第二氧化硅膜14形成，在第一氧化硅膜12上形成第一薄金属膜15和第二薄金属膜16，部分地除去第一氧化硅膜12的末端的第一氧化硅膜12 小孔13，并用导电材料填充小孔13，以形成通孔电极17。

公开(公告)号：US06556333B2

公开(公告)日：2003-04-29

申请号：US09915041

申请日：2001-07-25

申请人： Kazunari Tokuda ,  Yoshiro Nishimura ,  Masahiro Katashiro

发明人： Kazunari Tokuda ,  Yoshiro Nishimura ,  Masahiro Katashiro

IPC分类号： G02B2608

CPC分类号： G06K7/14 ,  B81B3/0051 ,  B81B2201/042 ,  B81B2203/053 ,  B81B2203/058 ,  G06K7/10

摘要： An optical scanner has a coil and a reflection face. This optical scanner also has: a movable plate positioned at its neutral position in a stop state; torsion bars connected to the movable plate; a support body turnably supporting the movable plate by means of the torsion bars; and a restriction member disposed at a position spaced with a predetermined distance from a surface of the movable plate. The restriction member comes into physical contact with the movable plate when a shock is applied to the optical scanner. The restriction member restricts a displacement of the movable plate equal to or greater than a predetermined quantity. The movable plate is turned with the torsion bars being a turning axis.

公开(公告)号：US06765706B2

公开(公告)日：2004-07-20

申请号：US10219639

申请日：2002-08-15

申请人： Kazunari Tokuda ,  Masahiro Katashiro ,  Michitsugu Arima ,  Hiroshi Miyajima

发明人： Kazunari Tokuda ,  Masahiro Katashiro ,  Michitsugu Arima ,  Hiroshi Miyajima

IPC分类号： G02B2608

CPC分类号： G02B6/3572 ,  G02B6/3512 ,  G02B26/085

摘要： There is disclosed an optical deflector comprising an oscillating member including a movable plate allowed to oscillate, the movable plate including a coil extending along its periphery, and a magnetic field generation portion, such that the movable plate oscillates in accordance with a force generated by an interaction of a current flowing through the coil with the magnetic field generated by the magnetic field generation portion, wherein the movable plate has first and second surfaces extending in substantially parallel with each other, an imaginary plane including the first surface of the movable plate in a neutral position defines two spaces, one including the second surface of the movable plate and the other not including the second surface, and the magnetic field generation portion is positioned in the space including the second surface of the movable plate.

摘要翻译： 公开了一种光偏转器，其包括摆动构件，该摆动构件包括允许摆动的可移动板，所述可移动板包括沿其周边延伸的线圈和磁场产生部分，使得可动板根据由 流过线圈的电流与由磁场产生部产生的磁场的相互作用，其中可动板具有彼此大致平行延伸的第一和第二表面，包括可动板的第一表面的假想平面， 中间位置限定两个空间，一个包括可移动板的第二表面，另一个不包括第二表面，并且磁场产生部分位于包括可移动板的第二表面的空间中。