Invention Grant
- Patent Title: Microelectromechanical apparatus for elevating and tilting a platform
- Patent Title (中): 用于升降平台的微机电装置
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Application No.: US09827858Application Date: 2001-04-05
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Publication No.: US06545385B2Publication Date: 2003-04-08
- Inventor: Samuel Lee Miller , Paul Jackson McWhorter , Murray Steven Rodgers , Jeffry J. Sniegowski , Stephen M. Barnes
- Applicant: Samuel Lee Miller , Paul Jackson McWhorter , Murray Steven Rodgers , Jeffry J. Sniegowski , Stephen M. Barnes
- Main IPC: H02N100
- IPC: H02N100

Abstract:
A microelectromechanical (MEM) apparatus is disclosed which has a platform that can be elevated above a substrate and tilted at an arbitrary angle using a plurality of flexible members which support the platform and control its movement. Each flexible member is further controlled by one or more MEM actuators which act to bend the flexible member. The MEM actuators can be electrostatic comb actuators or vertical zip actuators, or a combination thereof. The MEM apparatus can include a mirror coating to form a programmable mirror for redirecting or switching one or more light beams for use in a projection display. The MEM apparatus with the mirror coating also has applications for switching light beams between optical fibers for use in a local area fiber optic network, or for use in fiber optic telecommunications or data communications systems.
Public/Granted literature
- US20010048265A1 Microelectromechanical apparatus for elevating and tilting a platform Public/Granted day:2001-12-06
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