Invention Grant
US06548354B2 Process for producing a semiconductor memory device comprising mass-storage memory cells and shielded memory cells for storing reserved information 有权
一种用于制造半导体存储器件的方法,包括大容量存储单元和用于存储预留信息的屏蔽存储单元

Process for producing a semiconductor memory device comprising mass-storage memory cells and shielded memory cells for storing reserved information
Abstract:
A process for manufacturing a semiconductor memory device includes double polysilicon level non-volatile memory cells and shielded single polysilicon level non-volatile memory cells in the same semiconductor material chip. A first memory cell includes a MOS transistor having a first gate electrode and a second gate electrode superimposed and respectively formed by definition in a first and a second layer of conductive material. A second memory cell is shielded by a layer of shielding material for preventing the information stored in the second memory cell from being accessible from the outside. The second memory cell includes a MOS transistor with a floating gate electrode formed simultaneously with the first gate electrode of the first cell by definition of the first layer of conductive material. The layer of shielding material is formed by definition of the second layer of conductive material.
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