Invention Grant
- Patent Title: Optoelectronic microelectronic system
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Application No.: US10093320Application Date: 2002-03-07
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Publication No.: US06553157B2Publication Date: 2003-04-22
- Inventor: Thomas Schultz , Wolfgang Rösner , Lothar Risch
- Applicant: Thomas Schultz , Wolfgang Rösner , Lothar Risch
- Priority: DE19942692 19990907
- Main IPC: G02B612
- IPC: G02B612

Abstract:
In an integrated optoelectronic microelectronic system, an optoelectronically active diode part is formed in a semiconductor substrate by zones forming depletion layers. The system is provided in a mesa that stands vertically on a semiconductor substrate and runs in a direction of extension thereof. A light waveguide is optically coupled to the diode part in such a way that light is coupled into the diode part via the mesa side wall.
Public/Granted literature
- US20020110329A1 Optoelectronic microelectronic system Public/Granted day:2002-08-15
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