发明授权
- 专利标题: Perforated work piece, and method for producing it
- 专利标题(中): 穿孔工件及其制造方法
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申请号: US09708277申请日: 2000-11-08
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公开(公告)号: US06558770B1公开(公告)日: 2003-05-06
- 发明人: Volker Lehmann , Hans Reisinger , Hermann Wendt , Reinhard Stengel , Gerrit Lange , Stefan Ottow
- 申请人: Volker Lehmann , Hans Reisinger , Hermann Wendt , Reinhard Stengel , Gerrit Lange , Stefan Ottow
- 优先权: DE19820756 19980508
- 主分类号: B32B324
- IPC分类号: B32B324
摘要:
A substrate made from silicon has a first region and a second region. Through pores are formed in the first region. Pores that do not traverse the substrate are provided in the second region. The production of the work piece is performed with the aid of electrochemical etching of the pores. The entire surface of the substrate is covered with a mask layer that is structured photolithographically on the rear of the substrate. The bottoms of the pores in the second region are etched clear, preferably using KOH.
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