- 专利标题: Toroidal low-field reactive gas source
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申请号: US10143061申请日: 2002-05-10
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公开(公告)号: US06559408B2公开(公告)日: 2003-05-06
- 发明人: Donald K. Smith , Xing Chen , William M. Holber , Eric Georgelis
- 申请人: Donald K. Smith , Xing Chen , William M. Holber , Eric Georgelis
- 主分类号: B23K1000
- IPC分类号: B23K1000
摘要:
An apparatus for dissociating gases includes a plasma chamber that may be formed from a metallic material and a transformer having a magnetic core surrounding a portion of the plasma chamber and having a primary winding. The apparatus also includes one or more switching semiconductor devices that are directly coupled to a voltage supply and that have an output coupled to the primary winding of the transformer. The one or more switching semiconductor devices drive current in the primary winding that induces a potential inside the chamber that forms a plasma which completes a secondary circuit of the transformer.
公开/授权文献
- US20020125225A1 Toroidal low-field reactive gas source 公开/授权日:2002-09-12
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