Invention Grant
- Patent Title: Method for forming a storage node of a capacitor
-
Application No.: US09934660Application Date: 2001-08-22
-
Publication No.: US06562679B2Publication Date: 2003-05-13
- Inventor: Kee-jeung Lee , Seoung-wook Lee , Seung-hyuk Lee , Chan-bae Kim , Wan-gie Lee
- Applicant: Kee-jeung Lee , Seoung-wook Lee , Seung-hyuk Lee , Chan-bae Kim , Wan-gie Lee
- Priority: KR2000-50183 20000828
- Main IPC: H01L218242
- IPC: H01L218242

Abstract:
A method for forming the storage node of a capacitor which simplifies its process, and improves the electrical characteristics of semiconductor products by forming the storage node of a capacitor with no stepped portion between cell regions and peripheral circuit regions necessary for memory storage of semiconductor products of the next generation to which a fine line width is applied, and, at the same time, forming a guard ring for dividing the cell regions and the peripheral circuit regions.
Public/Granted literature
- US20020106856A1 Method for forming a storage node of a capacitor Public/Granted day:2002-08-08
Information query