Invention Grant
- Patent Title: Organic anti-reflective coating polymer, anti-reflective coating composition and methods of preparation thereof
- Patent Title (中): 有机抗反射涂料聚合物,抗反射涂料组合物及其制备方法
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Application No.: US09891004Application Date: 2001-06-25
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Publication No.: US06562925B2Publication Date: 2003-05-13
- Inventor: Sung-eun Hong , Min-ho Jung , Jae-chang Jung , Geun-su Lee , Ki-ho Baik
- Applicant: Sung-eun Hong , Min-ho Jung , Jae-chang Jung , Geun-su Lee , Ki-ho Baik
- Priority: KR2000-37272 20000630
- Main IPC: C08F11802
- IPC: C08F11802

Abstract:
An organic anti-reflective polymer having the following Formula 1, its preparation method, an anti-reflective coating composition comprising the organic anti-reflective polymer and a preparation method of an anti-reflective coating made therefrom. The anti-reflective coating comprising the polymer eliminates standing waves caused by the optical properties of lower layers on the wafer and by the thickness changes of the photoresist, prevents back reflection and CD alteration caused by the diffracted and reflected light from such lower layers. Such advantages enable the formation of stable ultrafine patterns suitable for 64M, 256M, 1G, 4G, and 16G DRAM semiconductor devices, improving the production yields and controlling the k values. It is also possible to prevent undercutting due to an unbalanced acidity after finishing the coating.
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