Invention Grant
- Patent Title: Optical proximity correction with rectangular contact
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Application No.: US09860420Application Date: 2001-05-18
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Publication No.: US06563127B2Publication Date: 2003-05-13
- Inventor: Shun-Li Lin , Tsung-Hsien Wu
- Applicant: Shun-Li Lin , Tsung-Hsien Wu
- Priority: TW90109977A 20010426
- Main IPC: G01N2186
- IPC: G01N2186

Abstract:
An optical proximity correction method for producing a rectangular contact. The method includes representing the rectangular contact pattern required by an integrated circuit by a pair of connected hammerhead patterns and serif patterns at the inner straight corners of the hammerhead patterns. By varying the width of the connecting section of the hammerhead patterns, an optimal aspect ratio for the rectangular pattern is obtained.
Public/Granted literature
- US20020158214A1 Optical proximity correction with rectangular contact Public/Granted day:2002-10-31
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