- 专利标题: Integrated circuit having at least two vertical MOS transistors and method for manufacturing same
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申请号: US10081902申请日: 2002-02-22
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公开(公告)号: US06566202B2公开(公告)日: 2003-05-20
- 发明人: Bernd Goebel , Emmerich Bertagnolli
- 申请人: Bernd Goebel , Emmerich Bertagnolli
- 优先权: DE19720193 19970514
- 主分类号: H01L2100
- IPC分类号: H01L2100
摘要:
An integrated circuit having at least two vertical MOS transistors, and method for manufacturing same, wherein first source/drain regions of the two vertical MOS transistors are located in an upper region of sidewalls of a trench. A second source/drain region is shared by both MOS transistors and is adjacent at a floor of the trench. Gate electrodes of the MOS transistors that are arranged at the sidewalls of the trench can be individually contacted via parts of a conductive layer that are arranged above the first source/drain regions. In a manufacturing method, such arrangement is made possible by the deposition of a conductive layer of doped polysilicon before the generation of the trench. The area of an MOS transistor can amount to 4F2.
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