发明授权
- 专利标题: Abrasive fluid compositions
- 专利标题(中): 研磨液组成
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申请号: US09856713申请日: 2001-05-25
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公开(公告)号: US06569216B1公开(公告)日: 2003-05-27
- 发明人: Koji Taira , Shigeo Fujii , Yoshiaki Oshima , Koichi Naito
- 申请人: Koji Taira , Shigeo Fujii , Yoshiaki Oshima , Koichi Naito
- 优先权: JP10-336416 19981127; JP11-207473 19990722
- 主分类号: C09G102
- IPC分类号: C09G102
摘要:
A polishing composition comprising a chelating compound or a salt thereof; a partially esterified product and/or partially etherified product of a polyhydric alcohol compound; and water; a polishing composition comprising water, an abrasive, an intermediate alumina, and a chelating compound or a salt thereof, wherein the content of the intermediate alumina is from 1 to 50 parts by weight, based on 100 parts by weight of the abrasive; and a polishing composition comprising water, an abrasive, an intermediate alumina, a chelating compound or a salt thereof, and a partially esterified product and/or partially etherified product of a polyhydric alcohol compound, wherein the content of the intermediate alumina is from 1 to 50 parts by weight, based on 100 parts by weight of the abrasive. By using the polishing composition, the polishing rate can be increased, and the surface roughness can be lowered, without causing defects such as scratches and pits on the surface of an object to be polished.
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