Invention Grant
- Patent Title: Phase grating image sensing device and method of manufacture
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Application No.: US09847684Application Date: 2001-05-02
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Publication No.: US06570145B2Publication Date: 2003-05-27
- Inventor: Chin-Wen Huang , Jian-Bin Shiu , Ching-Ming Lee
- Applicant: Chin-Wen Huang , Jian-Bin Shiu , Ching-Ming Lee
- Main IPC: H01L2700
- IPC: H01L2700

Abstract:
A phase grating image-sensing device. The device includes a plurality of photodiodes, a smoothing layer, a color filter layer and a plurality of phase gratings. The photodiodes are formed on a substrate and isolated from each other by isolation structures. The smoothing layer covers the photodiodes and the isolation structures. The color filter layer is embedded within the smoothing layer forming a sandwich structure with the smoothing layer. The phase gratings are formed over the smoothing layer positioned at corresponding locations above isolation structures. The phase grating layers produce a constructive interference of light passing through the smoothing layer.
Public/Granted literature
- US20020162944A1 Phase grating image sensing device and method of manufacture Public/Granted day:2002-11-07
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