发明授权
- 专利标题： Loader conveyor for substrate processing system
- 专利标题（中）： 用于基板加工系统的装载机输送机
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申请号： US09684142申请日： 2000-10-05
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公开(公告)号： US06572321B1公开(公告)日： 2003-06-03
- 发明人: Jaim Nulman
- 申请人： Jaim Nulman
- 主分类号： B65G1133
- IPC分类号： B65G1133
摘要：
A loader conveyor adapted so as to receive a wafer carrier from a transfer conveyor and adapted to terminate at an intersection with a processing system, is provided. Thus, the need for a front-end loader robot may be eliminated.
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